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Full decoupling three-freedom micromechanical gyroscope

A technology of micro-mechanical gyroscope and degree of freedom, which is applied in gyro effect for speed measurement, gyroscope/steering sensing equipment, speed/acceleration/shock measurement, etc. It can solve poor stability, difficult decoupling structure design, low sensitivity, etc. problem, to achieve the effect of improving stability, improving sensitivity, and improving system bandwidth

Active Publication Date: 2019-04-23
NORTHEASTERN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The advantage of using a single-degree-of-freedom vibration structure for two modes at the same time is that frequency matching can improve sensitivity, but it will cause severe mechanical coupling and poor stability; while using a two-degree-of-freedom vibration structure can improve stability, but lower sensitivity , the design of the decoupling structure is more difficult

Method used

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  • Full decoupling three-freedom micromechanical gyroscope
  • Full decoupling three-freedom micromechanical gyroscope
  • Full decoupling three-freedom micromechanical gyroscope

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Embodiment Construction

[0016] The present invention is described in more detail below in conjunction with accompanying drawing example:

[0017] combine figure 1 The structure of the present invention mainly includes a driving frame 1 , a decoupling mass 2 , a dynamic driving comb 5 and a static driving comb 7 , a detection frame 3 , a sensitive mass 4 , a dynamic sensitive comb 6 and a static sensitive comb 8 . The driving unit composed of the dynamic driving comb 5 and the static driving comb 7 is arranged on the driving frame 1, the driving frame 1 is connected with the anchor point 13 through the spring beam 9a, and the driving frame 1 and the decoupling mass 2 are connected through the spring beam The two 10b are connected, and the decoupling mass 2 and the detection frame 3 are connected through the spring beam 19b, thereby constituting the driving mode of the micromechanical gyroscope. Decoupling mass 2 and detection frame 3 are connected by spring beam 1 9b, detection frame 3 and anchor poi...

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Abstract

The invention discloses a full decoupling three-freedom micromechanical gyroscope. The mechanical decoupling performance of the micromechanical gyroscope is improved. The micromechanical gyroscope structurally comprises a freedom driving model and a complete two-freedom sensitive model which are respectively connected with a driving framework and a detection framework through a decoupling mass block; meanwhile, the mechanical decoupling and energy conversion of the driving model and the sensitive model are realized at the same time. The complete two-freedom structure can increase the stable bandwidth of the sensitive model; the stability and the anti-interference capability of the gyroscope system are improved. The full decoupling three-freedom micromechanical gyroscope has the advantagesof mechanical decoupling, high stability and anti-interference, works at the normal pressure and is favorable for practical processing and application.

Description

technical field [0001] The invention belongs to the technical field of micromechanics, and relates to a fully decoupled micromechanical gyroscope structure with three degrees of freedom. Background technique [0002] Micromechanical gyroscope is the third generation gyroscope developed on the basis of the development of silicon microelectromechanical technology. Compared with the first generation mechanical rotor gyroscope and the second generation optical gyroscope, the micromechanical gyroscope has the advantages of small size, light weight, low cost, The advantages of low power consumption, high reliability, and strong shock resistance are suitable for mass production. Therefore, micro-mechanical gyroscopes are widely used in aerospace, micro-inertial navigation systems, automotive industry, guided bombs, robotics, and consumer electronics. [0003] With the continuous development of micromachined gyroscopes, the research of micromachined gyroscopes mainly focuses on two ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5656G01C19/5663
CPCG01C19/5656G01C19/5663
Inventor 吕晓永李文杰胡晟单鹏沙晓鹏谭雁清
Owner NORTHEASTERN UNIV
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