On-chip online self-detection system for digital closed-loop accelerometer and method
A digital closed-loop, accelerometer technology, applied in speed/acceleration/shock measurement, speed/acceleration/shock measurement equipment testing/calibration, measurement devices, etc., can solve MEMS device parameters easy to drift, easy to fail equipment, difficult Real-time online measurement and other issues, to achieve the effect of easy on-chip integration, convenient control, and small distortion
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[0034] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings, but it is not limited thereto. Any modification or equivalent replacement of the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention should be covered by the present invention. within the scope of protection.
[0035] The invention provides an on-line self-detection system on a digital closed-loop accelerometer chip, such as figure 1 As shown, the online self-test system 800 consists of a MEMS sensitive structure 100, a charge amplifier 200, a loop compensator 300, a Sigma-Delta modulator 400, a digital self-test excitation source 500, a digital operation unit 600, and a digital signal processing module 700 constitute, of which:
[0036] The capacitive MEMS sensitive structure 100 is composed of three parts: an upper electrode 101, a mass 102, and a lower ele...
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