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On-chip online self-detection system for digital closed-loop accelerometer and method

A digital closed-loop, accelerometer technology, applied in speed/acceleration/shock measurement, speed/acceleration/shock measurement equipment testing/calibration, measurement devices, etc., can solve MEMS device parameters easy to drift, easy to fail equipment, difficult Real-time online measurement and other issues, to achieve the effect of easy on-chip integration, convenient control, and small distortion

Active Publication Date: 2019-04-16
HARBIN INST OF TECH
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Problems solved by technology

[0004] In order to solve the problem that MEMS device parameters are easy to drift, easy to fail, and the traditional detection scheme is limited by complex instruments and equipment, it is difficult to complete real-time online measurement. Based on the Sigma-Delta digital closed-loop accelerometer detection scheme, the present invention proposes a digital closed-loop acceleration On-chip online self-test system and method, so as to realize real-time monitoring of its working status and online measurement of loop harmonic distortion

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  • On-chip online self-detection system for digital closed-loop accelerometer and method

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[0034] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings, but it is not limited thereto. Any modification or equivalent replacement of the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention should be covered by the present invention. within the scope of protection.

[0035] The invention provides an on-line self-detection system on a digital closed-loop accelerometer chip, such as figure 1 As shown, the online self-test system 800 consists of a MEMS sensitive structure 100, a charge amplifier 200, a loop compensator 300, a Sigma-Delta modulator 400, a digital self-test excitation source 500, a digital operation unit 600, and a digital signal processing module 700 constitute, of which:

[0036] The capacitive MEMS sensitive structure 100 is composed of three parts: an upper electrode 101, a mass 102, and a lower ele...

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Abstract

The invention discloses an on-chip online self-detection system for a digital closed-loop accelerometer and a method. The online self-detection system comprises an MEMS sensitive structure, a charge amplifier, a loop compensator, a Sigma-Delta modulator, a digital self-detection excitation source, a digital operation unit and a digital signal processing module, wherein the MEMS sensitive structureis formed by a top electrode, an intermediate mass block and a bottom electrode; the MEMS sensitive structure, the charge amplifier, the loop compensator and the Sigma-Delta modulator form a closed-loop negative feedback servo system; and the closed-loop negative feedback servo system, the digital self-detection excitation source, the digital operation unit and the digital signal processing module form a digital closed-loop self-detection circuit. According to the system and the method, the MEMS sensitive structure is excited by adopting electrostatic force, so that self-detection of harmonicdistortion of the accelerometer can be realized, the dependence on complex instrument equipment in a traditional detection mode is avoided, and on-line measurement can be realized.

Description

technical field [0001] The invention belongs to the technical field of sensor interface application-specific integrated circuits, and relates to a MEMS accelerometer on-chip real-time online self-detection system and method. Background technique [0002] In MEMS accelerometers, the capacitive sensitive structure is the most widely used sensitive structure type in practical applications. This is not only due to its better stability and process adaptability, but also an important reason why its parallel plate structure is easier to realize closed-loop electrostatic servo through electrostatic force. The closed-loop electrostatic force servo technology not only effectively improves the bandwidth, linearity, dynamic range and other important indicators of the accelerometer, but also alleviates the contradictory compromises encountered in the design of sensitive structures, enabling the adoption of low-damping vacuum packaging structures. This significantly reduces the mechanica...

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Application Information

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IPC IPC(8): G01P21/00
CPCG01P21/00
Inventor 刘晓为陈东亮尹亮付强张宇峰
Owner HARBIN INST OF TECH
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