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Accelerometer

An accelerometer and mass block technology, applied in the direction of measurement of acceleration, velocity/acceleration/shock measurement, measurement device, etc., can solve the problems of poor anti-adhesion of eccentric accelerometer, and achieve the effect of adjustable front-end sensitivity and easy integration

Pending Publication Date: 2019-03-08
SENODIA TECH (SHANGHAI) CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The technical problem to be solved by the present invention is: due to the limitations of the existing processing technology, the anti-adhesion of the eccentric accelerometer is relatively poor

Method used

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Embodiment Construction

[0035] The idea, specific structure and technical effects of the present invention will be further described below in conjunction with the accompanying drawings, so as to fully understand the purpose, features and effects of the present invention.

[0036] Unless otherwise defined, the technical terms or scientific terms used in the claims and description of the present invention shall have the ordinary meanings understood by those skilled in the technical field to which the present invention belongs. "First", "second" and similar words used in the specification and claims do not indicate any sequence, quantity or importance, but are only used to distinguish different components. "A" or "one" and similar words do not indicate a limitation of number, but mean that there is at least one. In the description of the present invention, unless otherwise specified, "plurality" means two or more. Words such as "comprising" or "having" and similar terms mean that the elements or object...

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Abstract

The invention provides an accelerometer. The accelerometer comprises a mass block, an anchor point and a detection electrode; the mass block is arranged to be driven to perform resonance in the driving direction, and performing rotating resonance around a rotating shaft at the same time; the mass block is connected to the anchor point; the detection electrode is used for detecting movement of themass block. The accelerometer has the advantages that a novel accelerometer is made by means of the resonance principle, and the functions of resisting adhesion, resisting impact, being likely to integrate with a gyroscope and adjustable in front end sensitivity and the like can be achieved.

Description

technical field [0001] The invention relates to an accelerometer, which belongs to the field of micro-electromechanical technology. Background technique [0002] Micro-accelerometers based on Micro-Electro-Mechanical-System (MEMS, Micro-Electro-Mechanical-System) have been widely used in industry, medical treatment, civilian use, military, etc. due to their small size, low cost, good integration, and excellent performance. fields have been increasingly applied. At present, in the application of various mobile terminals, cameras, game controllers, navigators and other products, to a certain extent, it has become a standard configuration. In the development process, capacitive, resistive, and piezoelectric methods are the main application mechanisms for detecting acceleration. Among them, capacitive accelerometers are simple in structure, low in cost, and have high sensitivity in the low frequency range. And linearity and other advantages, become the most popular type of acc...

Claims

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Application Information

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IPC IPC(8): G01P15/097G01P15/125
CPCG01P15/097G01P15/125G01P2015/0862
Inventor 邹波
Owner SENODIA TECH (SHANGHAI) CO LTD
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