Color confocal three-dimensional morphology measuring method and system

Abstract

The invention relates to a color confocal three-dimensional morphology measuring method and system. A polychromatic light source is employed and a relationship between wavelength colors and displacement is obtained through axial dispersion, so that a time consuming problem caused by axial scanning is solved and the measuring speed is increased. A stray signal of a focal plane is obtained is filtered through a small hole and a sharp signal located at the focal plane is obtained, so that the high axial resolution is realized. A color camera is used as the data receiving end and thus all height information of the surface of the measured object in the view field can be obtained by shooting once, so that the measuring speed is increased. The color confocal three-dimensional morphology measuringmethod is especially suitable for the color confocal parallel scanning system. According to the invention, the height information extraction of the measured object point is completed only by one imaging; and the three-dimensional topographical feature of the measured object surface is obtained by combining the two-dimensional information provided by the two-dimensional displacement system. Therefore, a novel path is provided for detection of the three-dimensional morphology of the surface of the object.

Description

technical field [0001] The invention relates to the field of optical measurement, more specifically, to a color confocal three-dimensional shape measurement method and a color confocal three-dimensional shape measurement system. Background technique [0002] With the rapid development of science and technology and manufacturing, precision metrology technology represented by surface three-dimensional shape measurement has attracted more and more attention from scholars, and more and more fields have great demand for three-dimensional shape measurement of objects. , such as machinery and automobile manufacturing, medical imaging measurement, space remote sensing, etc. In the field of medicine, the department of stomatology uses three-dimensional measuring instruments to measure teeth, the department of plastic surgery uses three-dimensional imaging of the appearance of human skin for scheme design and operation implementation, and the cardiac surgery uses detection and monitor...

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Problems solved by technology

[0009] However, the disadvantage of the above invention is that at least two fringes with different phases are required to be projected onto the surface of the measured object before subsequent image processing can be performed.

[0011] However, the method described in this paper cannot guarantee the linearity of the relationship with the axial height because the RGB value is directly calibrated.

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