A three-dimensional decoupling scanning probe
A scanning probe and decoupling technology, which is applied in the field of three-dimensional decoupling scanning probe, can solve the problems of incomplete decoupling probe, difficult processing and assembly, complex structure, etc., and achieve high sensitivity, good stability, and mechanical structure. simple effect
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[0040] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0041] The working principle of the present invention is: when the measuring head is actually working, the measured object is fixed on the workbench, and the measuring head is moved. When the measuring ball of the measuring rod at the front end of the measuring needle contacts the surface of the measuring object, it will be affected by the measuring force. , the measuring force can be decomposed into component forces along the X, Y and Z directions respectively.
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