Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

A three-dimensional decoupling scanning probe

A scanning probe and decoupling technology, which is applied in the field of three-dimensional decoupling scanning probe, can solve the problems of incomplete decoupling probe, difficult processing and assembly, complex structure, etc., and achieve high sensitivity, good stability, and mechanical structure. simple effect

Active Publication Date: 2020-08-04
XIAN TECH UNIV
View PDF13 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Parallel probes (such as the patent U.S.PatNo.5029398 applied by German Fritz Ertl et al.) are decoupled from each other in each measurement direction, but the structure is complex and difficult to process and assemble;
[0005] The series-parallel composite probe (such as the patent U.S. Pat No. 6131300 applied by Klingelnberg, Germany) has a relatively simple structure, but it is an incompletely decoupled probe, and there are still coupling errors

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A three-dimensional decoupling scanning probe
  • A three-dimensional decoupling scanning probe
  • A three-dimensional decoupling scanning probe

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0040] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0041] The working principle of the present invention is: when the measuring head is actually working, the measured object is fixed on the workbench, and the measuring head is moved. When the measuring ball of the measuring rod at the front end of the measuring needle contacts the surface of the measuring object, it will be affected by the measuring force. , the measuring force can be decomposed into component forces along the X, Y and Z directions respectively.

...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to the technical field of precision measuring instruments and particularly relates to a three-dimensional decoupling type scanning probe. The three-dimensional decoupling scanning probe comprises an X and Y direction measuring mechanism, a Z direction measuring mechanism, a probe housing, a measuring rod and a spring balancing mechanism. According to the probe, X direction, Ydirection and Z direction moving guide rails are formed through three sets of mutually perpendicularly installed diaphragm guiding mechanisms, an inductive sensor is installed in each of the three directions to measure the micro-displacement of a test needle in the three directions of X, Y, and Z. According to the probe of the invention, the mutual decoupling is performed in three directions, theprobe has the advantages of compact structure, small volume, high measurement precision, high sensitivity and good long-term stability, and one-dimensional, two-dimensional and three-dimensional scanning measurement can be realized.

Description

technical field [0001] The invention relates to the technical field of precision measuring instruments, in particular to a three-dimensional decoupling scanning probe. Background technique [0002] The three-dimensional probe is an important component in precision measuring instruments, especially in coordinate measuring machines. With the rapid development of measurement technology, the precision requirements for 3D probes are getting higher and higher. At present, the three-dimensional probes used on coordinate measuring machines at home and abroad mainly include series type, parallel type and series-parallel composite type; [0003] The tandem probe (such as the patent U.S. Pat No. 4660296 applied by Mauser-Werke Oberndorf GmbH in Germany and the patent U.S. Pat No. 5353510 applied by Ulbrich et al. in Belgium) is relatively simple in structure, but there is coupling between each measurement direction, which cannot be measured during measurement. Avoid mechanical coupli...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01B7/00G01B7/02
CPCG01B7/00G01B7/02
Inventor 王洪喜龙耀贾建军王冠伟田慧慧梁文宏王亚晓
Owner XIAN TECH UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products