Laser differential confocal curvature radius measuring method and device
A technology of differential confocal and radius of curvature, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problem of unsatisfactory high-precision testing of the radius of curvature of spherical elements, achieve strong anti-environmental interference, ensure measurement accuracy, Effect of improved measurement accuracy
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Embodiment 1
[0045] Such as image 3 As shown, a laser differential confocal radius of curvature measurement device includes a laser 22, an optical fiber 23, and a point light source 1, which are sequentially placed in the beam splitter 2, annular pupil 3, and collimating lens in the direction of the light emitted by the point light source 1. 4 and converging lens 5, also comprise the D-shaped rear pupil 7 that is placed in beam splitter 2 reflection directions and the split pupil differential confocal detection system 8 that is made of microscopic objective lens 20 and CCD21; Main control computer 26 and motor The drive system 27 is connected so that it drives the linear guide rail 28 to drive the measured element 6 to scan along the optical axis.
[0046] When the device is used to measure the radius of curvature of the lens surface, the split pupil differential confocal detection system 8 in the system is used to locate the apex and the center of the sphere of the surface of the measure...
Embodiment 2
[0056] Such as Figure 4 As shown, a laser differential confocal radius of curvature measuring device, which is compatible with image 3 The difference of the rear split pupil differential confocal radius of curvature measuring device in the embodiment is that the rear pupil is replaced by a D-shaped rear pupil 7 with a circular rear pupil 30 .
[0057] The measurement steps of the device are the same as in Example 1.
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