Optical system used for checking extra-large-caliber convex double-curved-surface reflecting mirror

Abstract

The invention discloses an optical system used for checking an extra-large-caliber convex double-curved-surface reflecting mirror. In the system, the center of sphere of a spherical reflecting mirroris positioned on the rear focal point of the convex double-curved-surface reflecting mirror to be checked, and divergent rays emitted from the laser interferometer are injected from the center hole ofthe convex double-curved-surface reflecting mirror to be checked, and are refracted through a compensating lens group to be injected to the spherical reflecting mirror; and the rays reflected from the spherical reflecting mirror are reflected by the reflecting mirror to be checked to reach the spherical reflecting mirror again along a normal direction, and then, the rays are subjected to auto-collimation reflection to return to the interferometer along an original route. By use of the optical system, the high-accuracy checking of the extra-large-caliber convex double-curved-surface reflectingmirror with the caliber of 600mm and above can be realized, and while checking accuracy is guaranteed, the caliber of an auxiliary surface and system length can be reduced.

Description

technical field [0001] The invention relates to an optical system for inspecting aspheric surfaces, in particular to an optical system for inspecting super-large-diameter convex hyperboloid mirrors. Background technique [0002] Compared with spherical mirrors, aspherical lenses and mirrors can better eliminate the aberrations of the optical system. In the infrared optical system, due to the high cost of materials, the method of eliminating aberrations through multiple spherical mirrors is not suitable, and it is more common to eliminate aberrations by setting one or more aspheric surfaces. At present, in the field of space remote sensing and detection, the requirements for resolution are getting higher and higher. In order to achieve the goal of high resolution while controlling the weight of the system, the demand for large-aperture aspheric surfaces is also increasing. [0003] An important factor affecting the processing of large-diameter aspheric surfaces is the corre...

AI Technical Summary

Problems solved by technology

[0005] The classic Hindle method inspection has the shortcomings of large compensation mirror diameter and difficult processing and adjustment. Later research improved the Hindle method.

Regarding the improved method provided in the prior technical literature, although the aperture of the auxiliary mirror is reduced, due to the use of a semi-reflective and semi-transparent lens as the auxiliary mirror, there will be fewer choices of lens materials and difficult processing when inspecting super-large-aperture aspheric surfaces

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