A movable inflatable sealing device and a method of using the same

An inflatable sealing ring and sealing device technology, applied in the direction of engine sealing, electrical components, engine components, etc., can solve problems such as time delay, and achieve uniform sealing, good sealing, and good sealing performance.

Active Publication Date: 2019-01-15
SHENYANG KINGSEMI CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For some process stations inside the equipment, when important components such as robots fail, dismantling each process station for maintenance will obviously delay more precious time

Method used

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  • A movable inflatable sealing device and a method of using the same
  • A movable inflatable sealing device and a method of using the same
  • A movable inflatable sealing device and a method of using the same

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Embodiment Construction

[0025] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0026] Such as Figure 1~3 As shown, the movable inflatable sealing device of the present invention includes an inflatable sealing ring 1, a sealing ring fixing groove 2, a profile 3, a sealing device installation sheet metal 4, a double linear guide rail 5, an inflation system and an exhaust system, wherein the sealing device The overall pass profile 3, the sealing device installation sheet metal 4 is installed on the side surface of the mobile craft station A facing the fixed craft station B, and the fixed craft station B is equipped with double linear guide rails 5, and the mobile craft station A passes through the double linear guide rails 5) The fixed process station B can be connected in a relatively movable manner to perform pulling action.

[0027] The sealing device installation sheet metal 4 is provided with a sealing ring fixing groove 2, and the ...

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Abstract

The present invention relates to an inflatable sealing device, in particular to a movable inflatable sealing device and a method of using the same, the sealing device is installed on a mobile processstation, the mobile process station is connected with the fixed process station through a double linear guide rail, the bottom surface of the inflatable sealing ring is pasted into the sealing ring fixing groove through adhesive tape, the upper surface of the inflatable sealing ring is lower than the sealing ring fixing groove when the inflatable sealing ring is exhausted, and the pulling operation of the mobile process station can be carried out at this time; The inflatable sealing ring expands the upper surface of the sealing ring higher than the height of the sealing ring fixing groove in the inflatable state, so that the sealing effect can be achieved by tightly fitting the sealing sheet metal of the fixing process station. The movable inflatable sealing device adopts the movable inflatable sealing device, which can not only ensure the good sealing effect between the two process stations, but also enable the fixed process station to enter from the mobile process station for good maintenance when the fixed process station fails.

Description

technical field [0001] The invention relates to an inflatable sealing device, in particular to a movable inflatable sealing device and its usage method. Background technique [0002] With the rapid expansion of the semiconductor industry, semiconductor equipment is also developing rapidly, and the requirements for the manufacturing process of integrated circuit wafers are also getting higher and higher. In the wafer manufacturing process, the cleanliness of the process chambers is highly required, so each process chamber needs to have good sealing to prevent the external environment from polluting the process chambers. In order to match or exceed the production capacity of the lithography machine as much as possible for the front-end glue leveling and developing equipment, the number of units and robots of the equipment itself is increasing, and the volume of the equipment is also increasing. In order to facilitate transportation, assembly and maintenance, the entire large ...

Claims

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Application Information

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IPC IPC(8): H01L21/67F16J15/48
CPCF16J15/48H01L21/67173H01L21/6719
Inventor 张建
Owner SHENYANG KINGSEMI CO LTD
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