Method for compensation fitting differential signal used for extracting peak value of dispersion confocal

Abstract

The invention discloses a method for compensation fitting a differential signal used for extracting a peak value of dispersion confocal. The method comprises the following steps: fitting a differential signal of a normalized discrete spectral response signal by a linear least square method to obtain an initial peak wavelength; further obtaining an error between the initial peak wavelength of the normalized discrete spectral response signal and an ideal peak wavelength, and performing first derivative deformation on the error; solving a differential equation of the first derivative deformationto obtain an error between the initial peak wavelength of the fitted and normalized discrete spectral response signal and the ideal peak wavelength X; and further obtaining a fitted value of the idealpeak wavelength of the normalized discrete spectral response signal; thereby performing rapid measurement of dispersion confocal by utilizing a fitted value of the ideal peak wavelength of the normalized discrete spectral response signal to ensure the accuracy of rapid measurement of dispersion confocal.

Description

technical field [0001] The invention belongs to the field of confocal measurement, and in particular relates to a compensation and fitting differential signal method used for dispersion confocal peak extraction. Background technique [0002] Confocal microscopic measurement technology is mainly used to eliminate multiple scattered light when ordinary microscopes detect samples. Similar to confocal microscopic measurement, in dispersive confocal microscopy technology, the point light source is focused on the image plane behind it after passing through a half mirror and a dispersive lens. For imaging, a dispersive lens can focus different incident light waves at different axial positions. Dispersive confocal microscopy technology is commonly used in micro-nano surface structure measurement, fast coordinate measurement, transparent medium thickness measurement and online process inspection, etc. [0003] In the actual dispersive confocal microscopic measurement, if an object i...

AI Technical Summary

Problems solved by technology

Among them, the maximum value method (MPM) directly selects the spectral wavelength corresponding to the maximum light intensity point as the peak value, which is extremely susceptible to noise, but has extremely high calculation efficiency; the center of gravity method (COM) has high peak extraction accuracy. and reliability, with high computational efficiency; and fitting methods such as parabolic fitting method (PFM), Gaussian fitting method (GFM) and sinc2 fitting method (SFM) have higher peak extraction accuracy and reliability, but the computational efficiency Too low, difficult to achieve fast online measurement

Images