A kind of vanadium dioxide multilayer film system and its preparation method and application
A vanadium dioxide and multi-layer film technology, applied in the field of physics, can solve the problems affecting the phase transition performance of thin-film materials and the large differences in physical properties, and achieve the goal of reducing the probability of defect generation, reducing the number of layers, and simplifying the multi-layer film system structure. Effect
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[0055] This embodiment provides a vanadium dioxide multilayer film element, which includes a vanadium dioxide multilayer film system and an element substrate carrying the vanadium dioxide multilayer film system.
[0056] The specific steps of the preparation method of the vanadium dioxide multilayer film element are as follows:
[0057] Step 1. Theoretical design and optimization of the spectral performance of the vanadium dioxide multilayer film system
[0058] Using the existing film system analysis software, respectively analyze the influence trend and change rule of the sputtering process parameters on the performance of the graded refractive index material and the performance of the vanadium dioxide film, so as to evaluate the tolerance of the process preparation; The required gradient refractive index material film layer refractive index distribution prepared by the process; on this basis, the vanadium dioxide multilayer film system has a large spectral bandwidth range a...
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