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Ultra-precise displacement laser sensing method

A sensing method and ultra-precise technology, applied in the field of optical detection, can solve problems such as difficult to achieve ultra-high-precision displacement detection, and achieve the effect of ultra-high-precision measurement and high-magnification amplification

Inactive Publication Date: 2018-11-20
SICHUAN UNIV
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Problems solved by technology

[0004] In view of the above-mentioned deficiencies in the prior art, the present invention proposes an ultra-precise displacement laser sensing method, which is used to solve the problem that it is difficult to detect ultra-high-precision displacement in the existing laser displacement detection

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Embodiment Construction

[0016] The present invention will be further described below in conjunction with the accompanying drawings.

[0017] Such as figure 1 As shown, the ultra-precision laser displacement sensor consists of a laser emitting device (1), an arc-shaped mirror reflection device (2), a laser receiving device (3), and a controller (5). Preferably, the laser emitting device (1) is a laser emitting tube with relatively high parallelism; the arc-shaped specular reflection device (2) is a specular reflection element with a radius of curvature r; the laser receiving device ( 3) It is a CCD (Charge Coupled Device) or a PSD (Photoelectric Position Sensor), connected to the controller (5). The controller (5) includes a laser control module (51), an information processing module (52), a data calculation module (53), and an output interface module (54); the laser control module (51) is mainly used for controlling the The start-stop control of the laser emitting device (1), the information proces...

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Abstract

The invention discloses an ultra-precise displacement laser sensing method. According to the method, ultra-precise measurement is performed on the displacement of an object on the basis of an ultra-precise laser displacement sensor. The ultra-precise laser displacement sensor comprises a laser emitting device, a circular arc specular reflecting device, a laser receiving device and a controller; and the controller calculates the displacement value of the object to be detected according to a geometric mapping relationship between the change amount of a light receiving position on the laser receiving device and the surface position amount of the object to be detected. According to the ultra-precise displacement laser sensing method of the invention, the circular arc specular reflecting deviceis additionally arranged on an optical path from the reflected laser of the object to be detected to the laser receiving device; the position of a laser spot finally projected onto the laser receiving device changes greatly on the basis of the change of the angles of incidence of different laser beams on a circular arc mirror surface, the laser beams being identical in direction and different inincident position; and therefore, the displacement of the object to be detected is amplified at a high magnification on the laser receiving device, and the ultra-high precision measurement of the object to be detected is realized when the resolution of the laser receiving device is constant.

Description

technical field [0001] The invention belongs to the technical field of optical detection, in particular to an ultra-precise displacement laser sensing method. Background technique [0002] Using laser to detect the precise position of the target has been widely used in the field of high-precision measurement. The existing laser displacement detection is mostly based on the triangulation method. The object to be detected is irradiated by the laser beam, and the principle that the laser light reflected by the object to be detected at different positions is different on the photosensitive element is used to establish the displacement of the object to be detected and the light receiving position on the photosensitive element. The mapping geometric relationship of the change amount calculates the displacement value of the detected object by detecting the change amount of the light-receiving position. Therefore, the detection accuracy of the displacement is limited by the resolut...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 陈珂蒋伟
Owner SICHUAN UNIV
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