X-ray speckle detecting device and methods based on synchrotron radiation light source

Abstract

The invention provides an X-ray speckle detecting device based on a synchrotron radiation light source, the X-ray speckle detecting device is used for detecting wavefront information of an element tobe tested, and the X-ray speckle detecting device includes the synchrotron radiation light source, a monochromator, a scatterer and a detector arranged in sequence along the direction of an optical path. The position between the monochromator and the scatterer is used for mounting the element to be tested. In addition, the present invention also provides two X-ray speckle detecting methods based on the synchrotron radiation light source, and the two X-ray speckle detecting methods use the X-ray speckle detecting device based on the synchrotron radiation light source. The X-ray speckle detecting device based on the synchrotron radiation light source is combined with theoretical methods of laser speckle detection and synchrotron radiation X-ray propagation to realize the on-line detection function of optical elements; furthermore, the device sets the element to be tested between the monochromator and the scatterer, so that the device can be applied to the on-line detection of a large non-movable reflective mirror surface while being suitable for on-line detection of small elements to be tested.

Description

technical field [0001] The invention relates to an optical detection technology, in particular to an X-ray speckle detection device and method based on a synchrotron radiation light source. Background technique [0002] Since the first experiments were carried out at synchrotron radiation sources, the demands on the performance of synchrotron radiation beamlines have continued to increase. Today's third-generation synchrotron light sources provide coherent, collimated, high-brightness, and broad-spectrum (from far-infrared to X-ray) beams. Due to the higher and higher requirements for the quality of synchrotron light in experiments, the improvement of the light source also increases the requirements for the optical elements on the beamline, so that it can make full use of the X-rays in the spectrum of the synchrotron radiation source to achieve atomic-level material or structural analysis. For example, in the BL29XUL nano-focus beamline of the Spring-8 light source, two se...

AI Technical Summary

Problems solved by technology

However, if the scatterer of the existing X-ray speckle detection device is placed behind the element to be measured, then the wavefront curvature is directly obtained, and the wavefront slope needs to be deduced again, which will lead to low resolution, so the scattering bodies are often not placed behind the DUT

Therefore, the scatterer of this existing X-ray speckle detection device is placed in front of the element to be measured, and it is mostly used for transmission symmetric imaging or small movable samples, and is not suitable for immovable large reflective mirrors.

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