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A vacuum coating machine for capacitor metallization film processing

A technology of metallized thin film and vacuum coating machine, which is applied in vacuum evaporation coating, metal material coating process, sputtering coating, etc. It can solve the trouble of placing and taking out the workpiece, affect the coating efficiency of the workpiece, and delay the time. , to achieve the effect of convenient placement and removal, saving pick-and-place time, and improving processing efficiency

Active Publication Date: 2020-07-03
铜陵安盾电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, when using the vacuum coating machine, it is troublesome to place and take out the workpiece, which is time-consuming and affects the coating efficiency of the workpiece.

Method used

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  • A vacuum coating machine for capacitor metallization film processing
  • A vacuum coating machine for capacitor metallization film processing
  • A vacuum coating machine for capacitor metallization film processing

Examples

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Embodiment Construction

[0031] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0032] like Figure 1 to Figure 4 As shown, the present invention provides a capacitor metallized film processing vacuum coating machine, including a vacuum coating box 8, and the vacuum coating box 8 is provided with a supporting component 1, a clamping component 2, a lifting component 3, a turning component 4, Coating assembly 5, vacuuming assembly 6 and sealing assembly 7.

[0033] like figure 1 As shown, in the present invention...

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Abstract

The invention discloses a vacuum coating machine for capacitor metalized film processing. The vacuum coating machine comprises a vacuum coating box, wherein the vacuum coating box is internally provided with a support component, a clamping component, a lifting component, an overturning component, a coating component, a vacuum pumping component and a sealing component; the support component comprises two support seats; support cavities are formed in two ends of the interiors of the support seats; the support cavities are communicated with the surfaces of the support seats through transmission channels; arc-shaped support sliding chutes are formed in the support cavities; one end of each support sliding chute extends out from the support cavities; support rods are glidingly arranged in the support sliding chutes; driving racks are arranged on the support rods; driving gears meshed with the driving racks are arranged in the support cavities; transmission frames are arranged on the upper end surfaces of the support seats; transmission gears and support motors connected with the transmission gears are arranged on the transmission frames; and transmission synchronous belts are connectedbetween the transmission gears and the driving gears, so that workpieces can be conveniently put and taken, thereby shortening the workpiece putting / taking time and improving the coating efficiency.

Description

technical field [0001] The invention relates to the technical field of coating equipment, in particular to a vacuum coating machine for processing metallized films of capacitors. Background technique [0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under high vacuum, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and many others. The main idea is to divide it into two types: evaporation and sputtering. The object that the vacuum coating machine needs to coat is called the workpiece (or substrate), and the material that needs to be plated on the workpiece is called the target, such as silicon target, niobium target, aluminum target, titanium target, etc. The workpiece and the target are in the same vacuum chamber. Under vacuum conditions, argon gas with a certain pressure is introduced, and the argon gas is ionized into argon ions under t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24C23C14/50
CPCC23C14/24C23C14/505
Inventor 李海涛钱叶球邢武装
Owner 铜陵安盾电子科技有限公司
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