Three-degree-of-freedom flexible parallel motion platform for optoelectronic packaging

Abstract

The invention provides a three-degree-of-freedom flexible parallel motion platform which comprises a mobile platform, a fixed platform and three groups of same drive mechanisms. Each group of drive mechanism is fixedly connected onto the fixed platform; a connection line among the centers of the three groups of drive mechanisms is in a regular triangle shape; each group of drive mechanism comprises a rigid-flexible motion brank chain and a drive part; each rigid-flexible motion brank chain comprise a flexible spherical pair, a rigid connecting rod and a flexible revolute pair; a first end of each flexible spherical pair is fixedly connected with the mobile platform; a second end of each flexible spherical pair is fixedly connected with a first end of each rigid connecting rod; the first end of each flexible spherical pair is fixedly connected with each drive part; the second end of each flexible spherical pair is fixedly connected with a second end of each rigid connecting rod; and themobile platform rotates round a horizontal surface and / or move along the vertical direction. The three-degree-of-freedom flexible parallel motion platform provided by the invention is compact in structure, reasonable in layout, easy to assemble, and capable of realizing large-stroke high-accuracy posture adjustment.

Description

Technical field [0001] The invention relates to the technical field of optoelectronic packaging, in particular to a three-degree-of-freedom flexible parallel motion platform applied to optoelectronic packaging. Background technique [0002] Integrated optoelectronic devices are the core devices supporting the rapid development of optical fiber communications in the new century. Optoelectronic packaging is a process of aligning and coupling input and output array fibers and optical chips through a multi-degree-of-freedom motion platform under the guidance of a vision device. The motion platform is a platform for positioning chips and optical fibers in the optoelectronic packaging system, and plays an extremely important role in optoelectronic packaging. In the optoelectronic packaging process, the motion platform needs to achieve a two-rotation and one-shift (2R1T) three-degree-of-freedom large-stroke range of motion, that is, two rotational degrees of freedom around the horizont...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a three-degree-of-freedom flexible parallel motion platform, which solves the technical problems of low motion precision and small motion stroke of the motion platform in the prior art

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