X-ray diaphragm for miniaturized x-ray array combined refractive lens integrated assembly

Abstract

The invention discloses an X-ray diaphragm for a miniaturized integrated component of X-ray array combined refractive lenses. The X-ray diaphragm comprises a reshaping part and a filtering part, wherein the reshaping part means a structure for utilizing an X-ray diaphragm structure to block stray lights entering the outer part of the X-ray array combined refractive lens and carrying out primary collimation on beams; the filtering part means a filtering structure with alternative arrangement of light transmitting zones and light blocking zones in the X-ray diaphragm structure, and an X-ray light wave is split into a plurality of sub beams by the filtering structure. The X-ray diaphragm disclosed by the invention is applied to the miniaturized integrated component of the X-ray array combinedrefractive lenses, can realize high microzone resolution ratio and high sensitivity simultaneously and can carry out site analysis.

Description

technical field [0001] The invention relates to the field of X-ray detection and imaging, in particular to an X-ray diaphragm used in an X-ray array combined refraction lens integrated assembly of a micro-beam X-ray fluorescence analysis system. Background technique [0002] The X-ray fluorescence (XRF, X-Ray Fluorescence) analysis system can perform simple, fast, high-resolution and non-destructive elemental quantitative measurement and analysis on samples in various forms (solid / liquid / powder, etc.) under normal pressure. The micro-beam X-ray fluorescence analysis system (micro-XRF) has attracted extensive attention because of its higher micro-resolution. [0003] Micro-beam X-ray fluorescence analysis systems (micro-XRF) usually need to be equipped with X-ray focusing devices. In the X-ray fluorescence analysis system using X-ray focusing devices, although the resolution of the micro-area is greatly improved (usually by more than one order of magnitude), the count rate w...

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the shortcomings of the existing X-ray fluorescence spectrometer that the micro-resolution is not high enough, especially the detection sensitivity is not high enough due to the low count rate, and the structure is complex, the size is large, and the lack of portability is not possible. The X-ray diaphragm of the miniaturized X-ray array combined with the refraction lens integrated component is applied to the miniaturized micro-beam X-ray fluorescence analysis system, which can realize high micro-area resolution and high sensitivity at the same time, and can perform on-site analysis

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