A composite circuit board for gas sensing and capacitance

Abstract

The invention provides a gas sensor and capacitor-composited circuit board which is obtained by integrating a gas sensor and a capacitor in a circuit board and comprises an integrated circuit functionregion and a device arrangement region in the circuit board, wherein a slot comprises an upper capacitor region and an upper gas sensor region; a lower capacitor region comprises a capacitor lower electrode, a capacitor upper electrode and a dielectric material between the capacitor lower electrode and the capacitor upper electrode; an array gas sensor is arranged on an insulating isolation layer; the capacitor upper electrode has a common electrode of which a connection part exposed from the insulating isolation layer is used as a gas sensing array. The gas sensor and capacitor-composited circuit board provided by the invention solves a current problem of integrating the gas sensor with a circuit board, miniaturizes the gas sensor, realizes direct integration of a gas sensing function inthe circuit board, expands application of the gas sensor, and improves performance by matching with material research.

Description

technical field [0001] The invention belongs to the technical field of gas sensors, in particular to a circuit board combined with gas sensing and capacitance. Background technique [0002] Since the gas sensor came out in the 1930s, it has a history of more than 70 years, and its types have reached hundreds. At present, gas sensitive components are involved in many aspects of human production and life, and have been widely used in energy and resource development, environmental monitoring, national defense, aerospace and other fields, especially in the field of gas type and concentration detection. Traditional gas types and sensors that rely on concentration detection often have the disadvantages of large size, low precision, and slow response speed, and cannot meet the requirements of miniaturization and integration required by the industry today. Moreover, the thermal gas type and concentration sensors commonly used in the market today can only detect gas types and concen...

AI Technical Summary

Problems solved by technology

Traditional gas types and sensors that rely on concentration detection often have the disadvantages of large size, low precision, and slow response speed, and cannot meet the requirements of miniaturization and integration required by the industry today.

Moreover, the thermal gas type and concentration sensors commonly used in the market today can only detect gas type and concentration in one direction, and cannot complete the detection of gas type and concentration in two-dimensional directions.

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