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Gas concentration detection device and gas concentration detection method

A technology of gas concentration detection and gas concentration, which is applied in the detection field, can solve problems such as the inability to obtain gas concentration detection results, and achieve accurate detection results

Active Publication Date: 2018-06-05
CHINA ELECTRONICS PROD RELIABILITY & ENVIRONMENTAL TESTING RES INST
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Based on this, it is necessary to provide an accurate gas concentration detection device and a gas concentration detection method for the problem that it is difficult to judge whether the gas concentration itself has changed or the gas concentration detection sensor has failed, and the accurate gas concentration detection result cannot be obtained.

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  • Gas concentration detection device and gas concentration detection method

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Embodiment Construction

[0027] In order to make the purpose, technical solution and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present application, and are not intended to limit the present application.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this application belongs. The terminology used herein in the specification of the application is only for the purpose of describing specific embodiments, and is not intended to limit the application.

[0029] Such as figure 1 As shown, a gas concentration detection device includes a vacuum detection chamber 200, a vacuum sampling element 300, a gas concentration detection sensor 400, and is us...

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Abstract

The invention relates to a gas concentration detection device and a gas concentration detection method. The gas concentration detection device comprises a vacuum detection cavity, a gas concentrationdetection sensor, a vacuum sampling element and a detection analyzer, wherein the sampling element is connected with the detection cavity; the detection cavity is connected with an outer sealed cavityused for accommodating to-be-detected gas; the gas concentration detection sensor is arranged in the detection cavity; the detection analyzer is connected with the gas concentration detection sensorand the sampling element. According to the gas concentration detection device, the concentration of the gas is detected by the gas concentration detection sensor and the vacuum detection cavity, so that an accurate detection result can be obtained; gas in the sealed cavity is sampled by the sampling element, and a greater accurate detection result is obtained the analysis of the detection analyzer; in addition, whether the sensor goes wrong or not is judged by comparing the two concentration detection results by the detection analyzer, so that wrong concentration information due to the failureof the sensor is avoided. Therefore, the detection results are more accurate.

Description

technical field [0001] The present application relates to the detection field, in particular to a gas concentration detection device and a gas concentration detection method. Background technique [0002] With the development of electronic technology, the requirements for the packaging process of electronic devices are becoming more and more stringent. When there is a "hydrogen effect" in the packaging process, it will change the performance of the device, cause the device to work abnormally, and cause the device to fail. shorten the service life of the device. In order to solve the problem of the hydrogen effect of the device, it is necessary to quickly evaluate the ability of the device to resist "hydrogen poisoning". This requires accelerating the hydrogen effect of the device in high-temperature, high-pressure hydrogen gas, so we need to accurately control the hydrogen concentration in the high-temperature, high-pressure chamber, and need to detect the hydrogen concentr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N33/00
CPCG01N33/007
Inventor 陈义强何江恩云飞师谦黄云来萍黄亚兰吴谋智刘远
Owner CHINA ELECTRONICS PROD RELIABILITY & ENVIRONMENTAL TESTING RES INST
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