Axisymmetric silicon micromechanical gyroscope sensitive structure and manufacturing method thereof

Abstract

The invention discloses an axisymmetric silicon micromechanical gyroscope sensitive structure and a manufacturing method thereof, wherein the sensitive structure comprises an elastic frame with bonding anchor points on both sides, an axisymmetric through-hole region is arranged on the elastic frame and 'H'-shaped supporting beams are arranged on the symmetric axis of the axisymmetric through-holeregion, two axisymmetric sensitive mass blocks are arranged on each of two sides of each 'H'-shaped supporting beam, and are arranged in the through-hole region, and one side of each sensitive mass block is connected with the corresponding 'H'-shaped supporting beam through a coupling beam; the manufacturing method comprises the step of using a wet-dry combination method to prepare the sensitive structure on a single silicon wafer. The axisymmetric silicon micromechanical gyroscope sensitive structure disclosed by the invention realizes complete axisymmetric distribution, reduces the loss, decreases the stress concentration, lowers the motion coupling, and improves the mechanical sensitivity; the manufacturing method disclosed by the invention has the advantages of simple processing technology, high processing quality, high structural robustness, high stability, wide application range and the like.

Description

technical field [0001] The invention relates to a micro-electromechanical system and sensor technology, in particular to an axisymmetric silicon micro-mechanical gyro sensitive structure and a manufacturing method thereof. Background technique [0002] The gyroscope is a sensor for measuring the angular motion of the carrier. It is the core device in the fields of attitude measurement and inertial navigation. Very important application value. Gyroscopes based on micro-electromechanical systems (MEMS) technology have significant features such as small size, low cost, low power consumption, long life, and mass production. The scope of application continues to expand and the value of application continues to increase. [0003] Micromechanical gyroscopes can be divided into capacitive, piezoelectric, resistive, resonant, tunneling, etc. according to the detection method. Capacitive micromachined gyroscopes can be divided into comb-tooth and flat-plate structures according to t...

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Problems solved by technology

[0004] At present, the research and development units of micro-mechanical gyroscopes adopting flat capacitive structure at home and abroad are mainly Norwegian sensonor company. The sensitive structure of this type of micro-mechanical gyroscope published by it adopts "L"-shaped cross-section support beams, and multiple mass blocks share one support beam. The special support beam structure leads to asymmetric motion of the mass block with respect to the support beam, and the coupling between the structures is serious

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