A Real-Time Calculation Method of Nonlinear Error in Arctangent Demodulation of Phase Generated Carrier
A phase-generated carrier wave and nonlinear error technology, which is applied to instruments, measuring devices, optical devices, etc., can solve the problems that THD cannot realize real-time evaluation, and cannot directly calculate the magnitude of nonlinear error of phase demodulation, so as to achieve intuitive evaluation results , good real-time performance, simple effect
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[0016] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
[0017] The implementation process of the present invention is as follows:
[0018] (1) The interference fringes generated by the laser interferometer are detected by the photodetector, and the PGC arctangent demodulation is performed on the interference signal detected by the photodetector, and the demodulation phase is It is expanded by Fourier and simplified to get:
[0019]
[0020] Among them, ν is the proportional coefficient of the quadrature signal amplitude, and t represents time;
[0021] It can be seen that when ν≠1, the actual phase to be measured of the interferometer A non-linear error with a phase period of π is superimposed on and the actual phase to be measured The size of the corresponding nonlinear error is only related to the degree of deviation between the value of ν and 1.
[0022] (2) Use another photodetector to dete...
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