A partial pressure mass spectrometer calibration device and method

Abstract

The invention provides a partial pressure mass spectrometer calibration device, which mainly consists of a fine-tuning valve, a piston pressure gauge, a sample preparation chamber, a plurality of high-purity gas cylinders, a capacitance film vacuum gauge, a first-stage sampling chamber, a second-stage sampling chamber, a sampling chamber, small hole, calibration chamber, separation gauge and pumping system; the sample preparation chamber is connected to the piston pressure gauge and the capacitive film vacuum gauge respectively, and the sample preparation chamber is also connected to multiple high-purity gas cylinders connected in parallel through fine-tuning valves; Multiple sampling chambers with different volumes are connected in parallel between the sample preparation chamber and the primary sampling chamber, and multiple sampling chambers with different volumes are connected in parallel between the primary sampling chamber and the secondary sampling chamber. The chambers are connected in series with small holes and calibration chambers; the calibration chambers are respectively connected to the partial pressure mass spectrometer to be calibrated and the separation gauge; the sample preparation chamber, the primary sample injection chamber, the secondary sample injection chamber and the calibration chamber are all connected to the pumping system. The invention can not only configure the actually required mixed gas according to the customer's requirement, but also ensure that the gas does not change during the calibration process.

Description

technical field [0001] The invention relates to a partial pressure mass spectrometer calibration device and method, belonging to the technical field of vacuum measurement. Background technique [0002] Partial pressure mass spectrometers are widely used in various fields of industrial production, and the calibration of partial pressure mass spectrometers is an important research direction in the field of vacuum measurement. The document "Robert E.Ellefson.Methods for in situ QMScalibration for partial pressure andomposition analysis.Vacuum, 2014" introduces a partial pressure mass spectrometer calibration device, which combines two calibration methods: (1) direct the known group The mixed gas is introduced into the calibration chamber through a thin tube, and the partial pressure value of each component is obtained through a series of theoretical calculations with an ionization vacuum gauge as a reference standard; (2) First introduce a high-pressure mixed gas of about 100kP...

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Problems solved by technology

[0003] The disadvantages of this system are: (1) only the prepared mixed gas with known components can be used for calibration, and the gas cannot be prepared according to actual needs; The gas state is a viscous flow state, and the gas state changes to a molecular flow state after sample injection, resulting in a change in the composition of the mixed gas after sample injection, requiring complex theoretical calculations to correct the calibration results; (3) The reference standards used are respectively It is an ionization vacuum gauge and a capacitance film vacuum gauge, which leads to a large measurement uncertainty in its calibration results

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