Method and apparatus for deriving a topograpy of an object surface
A technology of object surface and equipment, applied in the field of deriving the topography of object surface
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[0026] figure 1 An apparatus 100 is depicted according to some embodiments. The coordinate system used is figure 1 The bottom of is indicated by an arrow. The x-axis is the horizontal axis running from left to right along the paper, the y-axis is towards the inside of the paper, and the z-axis is the vertical axis running from bottom to top of the paper.
[0027] The object under inspection comprises an object surface 3 with a surface topography. The object surface 3 may also be referred to as surface. Topography refers to the three-dimensional arrangement of physical geometric 3-dimensional properties of a surface such as shape, height and depth, ie, the configuration of a surface including its protruding features and their locations.
[0028] The object surface 3 is irradiated with laser light via fibers 31, 32, 33 from separate monochromatic light sources, i.e. creating sinusoidal signals of different colors (in figure 1 not shown). The fibers 31 , 32 , 33 are connect...
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