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A device for detecting the length and inclination of a single crystal silicon rod and its detection method

A technology of single crystal silicon rods and detection devices, which is applied in the direction of measuring devices, measuring inclination, and optical devices, etc., can solve the problems of low measurement accuracy and large errors of single crystal silicon rods, reduce production labor costs, and improve measurement The effect of precision

Active Publication Date: 2020-02-18
杭州慧翔电液技术开发有限公司
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Problems solved by technology

[0005] The present invention aims to provide a device for detecting the length and inclination of a single crystal silicon rod and its detection method, so as to solve the problem of low measurement accuracy and large errors of single crystal silicon rods in the prior art

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  • A device for detecting the length and inclination of a single crystal silicon rod and its detection method
  • A device for detecting the length and inclination of a single crystal silicon rod and its detection method
  • A device for detecting the length and inclination of a single crystal silicon rod and its detection method

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Embodiment Construction

[0044] The embodiments of the present invention will be described in detail below with reference to the accompanying drawings, but the present invention can be implemented in many different ways defined and covered by the claims.

[0045] A device for automatic detection of line length and slope measurement of single crystal silicon rods, comprising a detection device 1, a centering and slope measuring component, and a length measuring component; the centering and slope measuring component is used to measure the single crystal The silicon rod moves to the center of the width position of the device, and at the same time, the inclination measuring sensor is used to measure the slope of the end face of the single crystal silicon round rod, and then the length measuring component measures the length of the crystal rod through laser beam shooting;

[0046] The centering and inclination measurement assembly includes a horizontal rail seat 5, a screw motor 6, a screw 11, a gripper 12,...

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Abstract

The invention relates to a single crystal silicon rod length and slope detection device and a detection method thereof. The single crystal silicon rod length and slope detection device comprises a mobile loading and unloading device and a detection device thereof. The device also comprises a centering and slope measurement assembly arranged in the detection device. The invention also provides a single crystal silicon rod length and slope detection method. The method comprises the following steps: 1) material loading; 2) slope detection: starting the detection device, and detecting single crystal silicon rod cross section slope through the centering and slope measurement assembly; 3) length detection; and 4) material unloading: conveying single crystal silicon rods out of the detection device through the mobile loading and unloading platform. The single crystal silicon rod length and slope detection device and the detection device thereof effectively solve the problem of low efficiencyof a conventional manual single crystal silicon rod measurement method; through a multipoint sampling detection mode, detection precision is greatly improved; and through the full-automatic detectiondevice, production labor cost is obviously reduced.

Description

technical field [0001] The invention belongs to the field of single crystal silicon processing, and in particular relates to a device for detecting the length and slope of a single crystal silicon rod and a detection method thereof. [0002] technical background [0003] At present, with the rapid development of the solar photovoltaic industry, the demand for monocrystalline silicon rods as the main raw material has increased significantly. The slope is measured to calculate the effective length that can be cut into silicon wafers. [0004] However, in the existing technology, the measurement of single crystal silicon rods is usually very inaccurate, and it is easy to have deviation or measurement scale dislocation, which makes it very difficult to divide equal quantities, which not only consumes time and effort, reduces processing efficiency, but also divides The accuracy is low, and errors are prone to occur, which affects cutting. Contents of the invention [0005] The...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02G01C9/00
CPCG01B11/02G01B11/026G01C9/00
Inventor 曹建伟傅林坚周星陈翔朱全民严绍军叶欣沈文杰李林
Owner 杭州慧翔电液技术开发有限公司
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