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Shape measuring device and method based on structured light illumination

A technology for structured light illumination and measuring devices, which is applied in measuring devices, optical devices, instruments, etc., can solve the problems that restrict the application of zoom surface shape measurement methods, and achieve simple installation and adjustment, improved detection efficiency, and fast axial scanning speed Effect

Inactive Publication Date: 2018-02-23
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, affected by background noise, for samples with low reflectivity and large reflectivity differences, the conventional method will introduce large errors, which restricts the application of the zoom surface shape measurement method

Method used

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  • Shape measuring device and method based on structured light illumination
  • Shape measuring device and method based on structured light illumination
  • Shape measuring device and method based on structured light illumination

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] Embodiment 1: as attached figure 1 The illustrated embodiment provides a surface shape measurement device based on structured light illumination, which is used to quickly switch axial positions to realize three-dimensional tomographic scanning.

[0037] A surface shape measurement device based on structured light illumination, including a structured light illumination module, an axial scanning module and a detection module:

[0038] According to the direction of light propagation, the structured light illumination module is as follows: laser 1, conduction fiber 2, collimator 3, amplitude type sinusoidal grating 4 and tube mirror-5;

[0039] According to the direction of light propagation, the axial scanning module is as follows: polarization beam splitter one 6, quarter wave plate one 7, objective lens one 8, plane mirror 9, tube mirror two 10, tube mirror three 11, polarization beam splitter Two 12, quarter wave plate two 13 and objective lens two 14;

[0040] Accord...

Embodiment 2

[0046] Embodiment 2: as attached figure 2 and 3 The illustrated embodiment provides a surface shape measurement method based on structured light illumination, which is used to quickly switch the axial position to realize three-dimensional surface shape measurement.

[0047] A method for measuring surface shape based on structured light illumination, the method is implemented based on the surface shape measurement device based on structured light illumination described in Embodiment 1, and the specific steps are:

[0048] Data collection steps:

[0049] Step a, the laser 1 emits excitation light, and forms parallel light after passing through the conducting fiber 2 and the collimating mirror 3. After the parallel light is modulated by the amplitude type sinusoidal grating 4, it passes through the tube mirror 1 5, the polarizing beam splitter 1 6, and the quarter splitter in sequence. One wave plate one 7 and objective lens one 8 exit to the plane reflector 9, and the light aft...

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Abstract

The shape measuring device and method based on structured light illumination belongs to the technical field of optical microscopy imaging and measuring. The device and method are characterized in thatthe device comprises a structured light illumination module, an axial scanning module and a detection module. According to the shape measuring device and method based on structured light illumination, the axial scanning module comprising a polarization beam splitter, a quarter-wave plate, a low aperture objective lens, a tube lens and a plane reflector is added to a conventional structured lightillumination microscopy system, the high-speed axial movement of a stripe of the structured light illumination in an observed sample space is achieved, the pictures taken under fringe projections of different Z axis positions are processed by using windowed Fourier transform, correlation coefficients of each subarea image at the projected fringe frequency are calculated, an axial response curve ofdefinition of each lateral positions is acquired, the peak position of the curve is the relative height of the lateral position of the sample, and ultimately the surface shape of the sample is acquired. The device has the advantages that the installing and adjusting is simple, the axial scanning is fast, the surface reflectivity difference of the sample has small impact on a measuring result, andthe signal-to-noise ratio is high.

Description

technical field [0001] The present invention relates to a surface shape measurement device and method, in particular to a surface shape measurement device and method based on structured light illumination, which can realize high-speed axial scanning of structured light illumination stripes in the observed sample space, and reduce background noise The influence of the reflectance difference with the surface second of the sample on the measurement result belongs to the field of optical microscopic imaging and surface shape measurement. Background technique [0002] The zoom surface shape measurement method obtains the surface shape of the sample surface by judging the imaging clarity of the measured sample at different axial positions within the field of view of the imaging objective lens. The conventional zoom surface measurement method uses the stage to drive the sample to scan axially, and the scanning speed is slow and the efficiency is low. Moreover, conventional methods...

Claims

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Application Information

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IPC IPC(8): G01B11/25
CPCG01B11/2433G01B11/254
Inventor 刘辰光郑婷婷谭久彬
Owner HARBIN INST OF TECH
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