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Substrate hanging and feeding device and optical coating equipment

A technology of feeding device and coating machine, which is applied in sputtering coating, ion implantation coating, vacuum evaporation coating and other directions, can solve the problem of low efficiency of hanging and unloading, and achieve the effect of improving the efficiency of hanging and simplifying the work of hanging.

Pending Publication Date: 2018-02-06
爱发科(中国)投资有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to overcome the deficiencies of the above-mentioned prior art and provide a hanging piece feeding device, which aims to solve the problem of low efficiency of hanging and arranging pieces

Method used

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  • Substrate hanging and feeding device and optical coating equipment
  • Substrate hanging and feeding device and optical coating equipment
  • Substrate hanging and feeding device and optical coating equipment

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Embodiment Construction

[0027] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0028] see Figure 1 to Figure 3 , the embodiment of the present invention provides a coupon feeding device 100, which is used to feed the substrate into the coating machine 200. The coating machine 200 has a film feeding port 201 and an intermediate turntable 210, wherein the substrate can be a sheet made of glass , which can be used as a phone's screen, a tablet's screen, etc.

[0029] see Figure 1 to Figure 5 , the coupon feeding device 100 includes a substrate rack 110 , a delivery chamber 120 , an intermediate chamber 130 and a vertical delivery mechanism 140 . Substrate holder 110 is used...

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Abstract

The invention belongs to the technical field of optical coating and in particular relates to a substrate hanging and feeding device and optical coating equipment. The substrate hanging and feeding device comprises a substrate frame, a delivery chamber which is located at the left side of a coating machine and is communicated with a substrate delivery hole, an intermediate chamber which is communicated with the delivery chamber and located below the delivery chamber as well as a vertical delivery mechanism which is used for lifting the substrate frame to the delivery chamber from the intermediate chamber and delivering to an intermediate rotary table from the substrate delivery hole, so that the substrate frame is hung on the intermediate rotary table, the substrate frame comprises a base frame seat and an inverted hood connected with the right side of the base frame seat, the vertical delivery mechanism comprises an intermediate connecting component, a hanging frame which is connectedwith the intermediate connecting component and used for taking the substrate frame, a vertical driving component used for driving the connecting component to move up and down, and a horizontal drivingcomponent used for driving the intermediate connecting component to move left and right. Based on the structure of the substrate hanging and feeding device, substrate hanging operation is simplified,and substrate hanging efficiency is improved.

Description

technical field [0001] The invention belongs to the technical field of optical coating, and in particular relates to a coupon feeding device and optical coating equipment. Background technique [0002] In the optical coating equipment, it is necessary to use the hanging film feeding device to hang the substrate to the coating machine. At present, the process of hanging the substrate to the coating machine is relatively complicated, resulting in low hanging efficiency. Contents of the invention [0003] The purpose of the present invention is to overcome the shortcomings of the above-mentioned prior art and provide a hanging piece feeding device, which aims to solve the problem of low efficiency of hanging and arranging pieces. [0004] The present invention is realized in the following way: a coupon feeding device is used for feeding substrates into a coating machine, the coating machine has a feeding port and an intermediate turntable, and the coupon feeding device includ...

Claims

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Application Information

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IPC IPC(8): C23C14/22
CPCC23C14/22
Inventor 徐旻生庄炳河龚文志张永胜满小花王应斌
Owner 爱发科(中国)投资有限公司
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