Novel vacuum microelectronic pressure sensor

Abstract

The invention discloses a novel vacuum microelectronic pressure sensor, which comprises a sensor main body, and is characterized in that the sensor main body comprises a positioning base and a shell,the internal part of the surface of the positioning base is provided with two communicated grooves, each communicated groove is internally provided with an electrode lead, one end of the electrode lead is connected with a lead terminal, the other end of the electrode lead is connected with a gold wire electrode, the gold electrodes are electrically connected with a first silicon diaphragm and a second silicon diaphragm respectively, the second silicon diaphragm is installed at the surface of a silicon cup, the surface of the silicon cup is provided with a radioactive tip, the first silicon diaphragm and the second silicon diaphragm correspond to each other, the internal part of the positioning base is provided with an air inlet passage, the surface of the first silicon diaphragm is provided with an elastic silicon wafer, the air inlet passage discharges the air to the surface of the elastic silicon wafer through a branch pipe, and the top end of the shell is provided with a pressure transmitting piece. The device disclosed by the invention not only can detect the external direct contact pressure, but also can accurately detect small pressure generated by an air flow, thereby beinghigh in practicability and worthy of popularization.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a novel vacuum microelectronic pressure sensor. Background technique [0002] A smart pressure sensor is a device or device that can sense pressure signals and convert the pressure signals into usable output electrical signals according to certain rules. Pressure sensors are usually composed of pressure sensitive elements and signal processing units. According to different test pressure types , pressure sensors can be divided into gauge pressure sensors, differential pressure sensors and absolute pressure sensors. Pressure sensors are the most commonly used sensors in industrial practice. They are widely used in various industrial self-control environments, involving water conservancy and hydropower, railway transportation, and intelligent buildings. , Production automation, aerospace, military industry, petrochemical, oil well, electric power, ship, machine tool, pipeline and ma...

AI Technical Summary

Problems solved by technology

There is also a medical pressure sensor, but now the general pressure sensor has a single function, cannot detect different pressures at the same time, and the detection accuracy is not high

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