High-precision large-dynamic range measurement system and measurement method for transmission element aberration
A large dynamic range, transmission element technology, applied in the field of measurement, can solve problems such as small dynamic range, expensive measurement equipment, and complicated measurement process, and achieve the effects of simplified calibration, reduced difficulty in system construction and use, and simple operation
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[0018] Such as figure 1 As shown, a high-precision and large dynamic range measurement system for the aberration of a transmission element includes a display 1, a transmission element to be measured 2, a filter aperture plate 3, a CCD camera 4, a coordinate measuring machine (not shown) and computer (not shown). attached figure 1 It is a schematic diagram of the optical path of the optical deflection measurement of the present invention, and the thin solid line with arrows in the figure indicates the direction of the optical path. The transmission element 2 to be measured is a measured object through which light with processing errors can pass through the element body. The CCD camera 4 is an industrial camera. The display screen of the display 1 is arranged face to face with the lens of the CCD camera 4 . The central axis of the lens of the CCD camera 4 is perpendicular to the display screen of the display 1 and is located at the center of the display screen. The transmis...
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