A vacuum adsorption adjustment table for milling and grinding

Abstract

The invention relates to a novel vacuum-absorbable adjusting table for milling and grinding. From the perspective of improving the positioning accuracy of the workpiece in the milling process, a vacuum adsorption adjustment table is designed. On the premise of ensuring the vacuum adsorption force, it realizes the fine adjustment of the angle of the milling and grinding components, and can ensure the diameter of components with different calibers. to precise positioning. The adjustment table can be conveniently worked on the milling machine, replacing the general-purpose vacuum adsorption fixture; adding an adjustable and controllable angle adjustment degree of freedom for the initial milling position of the workpiece, and compensating for the process of vacuum adsorption (especially the O-shaped seal The axial uneven deformation of the ring) improves the positioning accuracy of milling and further ensures the milling accuracy. The invention can achieve high-precision repeated positioning of optical components, which is conducive to exploring the influence of milling process parameters on the milling process, and the milling of optical components with special requirements such as parallelism, concentricity, and edge thickness difference. There are huge advantages in application.

Description

Technical field [0001] The invention belongs to the field of optical processing equipment, in particular to a workpiece installation and adjustment table of a milling machine. Background technique [0002] At present, the optical components of traditional milling machines are usually fixed by vacuum adsorption. This method is helpful to realize quick assembly and disassembly of the optical element; and since the sealing ring is in soft contact with the optical element in this way, zero damage to the surface of the optical element is guaranteed. But it is precisely because of this soft contact method that the position of the optical element will produce radial and axial non-uniform errors before and after adsorption, which makes it difficult to ensure the parallelism of the milled flat optical element, and leads to spherical and The position of the apex of aspheric milling changes, which reduces the milling precision. Moreover, since milling and grinding cannot be completed...

AI Technical Summary

Problems solved by technology

But it is precisely because of this soft contact method that the position of the optical element will produce radial and axial non-uniform errors before and after adsorption, which makes it difficult to ensure the parallelism of the milled flat optical element, and leads to spherical and Aspheric milling vertex position changes, reducing milling precision

Moreover, since milling and grinding cannot be completed in one step, there must always be inspections interspersed in the middle, and the soft contact of vacuum adsorption will increase the uncertainty of the fixed position of the component after each milling and grinding

These are not conducive to high-precision milling of optical components

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