Phase Extraction Method of Digital Moire Fringe Combining Wavelet Analysis and Low-pass Filtering

A low-pass filtering and moiré fringe technology, applied in the field of digital moiré fringe phase extraction, can solve the problems of large spectral bandwidth and the inability of low-pass filtering and separation of the sum-frequency term and difference-frequency term of the Moiré composite image, etc. Achieve the effect of extending the measuring range

Active Publication Date: 2019-10-25
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0021] In order to solve the problem that the sum frequency term and the difference frequency term of the moiré composite diagram cannot be separated by conventional low-pass filtering due to the too large spectral bandwidth of the remaining wavefront of the interferogram, the technical problem to be solved by the present invention is: to provide a The digital moiré fringe phase extraction method combined with wavelet analysis and low-pass filtering can effectively expand the measurement range of digital moiré interferometry

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  • Phase Extraction Method of Digital Moire Fringe Combining Wavelet Analysis and Low-pass Filtering
  • Phase Extraction Method of Digital Moire Fringe Combining Wavelet Analysis and Low-pass Filtering
  • Phase Extraction Method of Digital Moire Fringe Combining Wavelet Analysis and Low-pass Filtering

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Embodiment 1

[0081] This embodiment demonstrates the effectiveness of the method of the present invention with actual measurement experiments.

[0082] In this embodiment, the tested object is a spherical mirror, and the spherical mirror is defocused. Defocus can make the remaining wavefront larger, so as to achieve the effect that spectral aliasing cannot be separated. The spherical mirror can be accurately measured by the ZYGO interferometer, and the measurement results of the ZYGO interferometer are used as a comparison to illustrate the effectiveness of the method of the present invention.

[0083] The flow of a digital Moiré fringe phase extraction method that combines wavelet analysis and low-pass filtering disclosed in this embodiment is as follows: figure 1 As shown, the specific steps are as follows:

[0084] Step 1, obtaining the actual interferogram and the virtual interferogram.

[0085] Step 1.1: Acquisition of Actual Interferogram I by Actual Interferometer R (x,y), the a...

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Abstract

The invention discloses a digital moire fringe phase extraction method combining wavelet analysis and low pass filtering and belongs to the optical measurement and image processing technology field. The method is characterized by using actual interference graph and phase-shift virtual interference graph moire synthesis to generate a phase shift moire composite graph, and using low pass filtering and combining a phase shift interferometry to extract a preliminary result of a moire fringe phase; according to a virtual interference wavefront acquired by a virtual interferometer, combining a filtering radius of a filter to determine a distribution center and a range of a low pass filtering error in the preliminary result of the moire fringe phase; after a low pass filtering error range and the center are positioned, carrying out wavelet decomposition on the preliminary result containing the low pass filtering error; and according to the positioned error center and the range, processing a wavelet coefficient so that the filtering error can be removed, according to an approximation coefficient and a processed wavelet coefficient, carrying out reconstruction and acquiring the moire fringe phase where the low pass filtering error is removed, which means that a measurement range of digital moire interference measurement is expanded.

Description

technical field [0001] The invention relates to a digital moiré fringe phase extraction method combining wavelet analysis and low-pass filtering, which belongs to the technical field of optical measurement and image processing. Background technique [0002] The principle of digital Moiré interferometry is to use the computer to calculate the virtual interferogram according to the actual interferometer optical path and the complex standard measured wave surface, and collect the measured wave surface of the actual interferometer in real time during the actual detection to form the actual interferogram. Moiré fringes are obtained by Tumor synthesis, [0003] The light intensity distribution in the virtual interferogram satisfies [0004] [0005] where I 1 (x,y) is the background DC component of the interferogram, γ 1 is the fringe contrast, δ R (x, y) is the remaining wavefront between the measured surface and the reference surface in the virtual interferometer, its siz...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00G01B9/02
CPCG01B9/0201G01B11/00
Inventor 郝群谭一丰张丽琼胡摇王劭溥
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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