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Digital moire fringe phase extraction method combining wavelet analysis and low pass filtering

A low-pass filtering and moiré fringe technology, applied in the field of digital moiré fringe phase extraction, can solve the problems of large spectral bandwidth, separation, and the inability of the sum-frequency term and difference-frequency term of the Moire composite image to pass through low-pass filtering, etc. Achieve the effect of extending the measuring range

Active Publication Date: 2017-11-24
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0021] In order to solve the problem that the sum frequency term and the difference frequency term of the moiré composite diagram cannot be separated by conventional low-pass filtering due to the too large spectral bandwidth of the remaining wavefront of the interferogram, the technical problem to be solved by the present invention is: to provide a The digital moiré fringe phase extraction method combined with wavelet analysis and low-pass filtering can effectively expand the measurement range of digital moiré interferometry

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  • Digital moire fringe phase extraction method combining wavelet analysis and low pass filtering
  • Digital moire fringe phase extraction method combining wavelet analysis and low pass filtering
  • Digital moire fringe phase extraction method combining wavelet analysis and low pass filtering

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Embodiment 1

[0081] In this embodiment, the effectiveness of the method of the present invention is illustrated by an actual measurement experiment.

[0082] In this embodiment, the measured object is a spherical mirror, and the spherical mirror is defocused. Defocusing increases the residual wavefront, resulting in an inseparable effect of spectral aliasing. The spherical mirror can be accurately measured by the ZYGO interferometer, and the measurement results of the ZYGO interferometer can be used as a comparison to illustrate the effectiveness of the method of the present invention.

[0083] The process of a digital moire fringe phase extraction method that combines wavelet analysis and low-pass filtering disclosed in this embodiment is as follows: figure 1 shown, the specific steps are as follows:

[0084] Step 1: Obtain an actual interferogram and a virtual interferogram.

[0085] Step 1.1: Acquire the actual interferogram I by the actual interferometer R (x,y), the actual interfe...

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Abstract

The invention discloses a digital moire fringe phase extraction method combining wavelet analysis and low pass filtering and belongs to the optical measurement and image processing technology field. The method is characterized by using actual interference graph and phase-shift virtual interference graph moire synthesis to generate a phase shift moire composite graph, and using low pass filtering and combining a phase shift interferometry to extract a preliminary result of a moire fringe phase; according to a virtual interference wavefront acquired by a virtual interferometer, combining a filtering radius of a filter to determine a distribution center and a range of a low pass filtering error in the preliminary result of the moire fringe phase; after a low pass filtering error range and the center are positioned, carrying out wavelet decomposition on the preliminary result containing the low pass filtering error; and according to the positioned error center and the range, processing a wavelet coefficient so that the filtering error can be removed, according to an approximation coefficient and a processed wavelet coefficient, carrying out reconstruction and acquiring the moire fringe phase where the low pass filtering error is removed, which means that a measurement range of digital moire interference measurement is expanded.

Description

technical field [0001] The invention relates to a digital moire fringe phase extraction method combining wavelet analysis and low-pass filtering, and belongs to the technical field of optical measurement and image processing. Background technique [0002] The principle of digital moiré interferometry is to use a computer to calculate a virtual interferogram based on the actual interferometer optical path and the complex standard measured wavefront, and collect the measured wavefront of the actual interferometer in real time during actual detection to form an actual interferogram. Moiré fringes are obtained by Tumor synthesis, [0003] The light intensity distribution in the virtual interferogram satisfies [0004] [0005] where I 1 (x,y) is the background DC component of the interferogram, γ 1 is the fringe contrast, δ R (x,y) is the residual wavefront between the measured surface and the reference surface in the virtual interferometer, and its size and spatial frequ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/00G01B9/02
Inventor 郝群谭一丰张丽琼胡摇王劭溥
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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