Double-sided POLO (POLy-Si on passivating interfacial Oxides) battery and preparation method thereof
A double-sided, battery technology, applied in circuits, electrical components, photovoltaic power generation, etc., can solve the problem of increasing the carrier transport distance and achieve the effects of reducing contact negative charge value, increasing response, and small current loss
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[0020] The present invention is described in further detail now in conjunction with accompanying drawing. These drawings are all simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, so they only show the configurations related to the present invention.
[0021] Such as figure 1 As shown, it is the best embodiment of the present invention, a double-sided POLO battery, including a silicon substrate 1, and the two sides of the silicon substrate 1 are sequentially provided with a SiOx tunneling oxide layer 2, a polysilicon layer 3 and ITO conductive film layer 4.
[0022] A method for preparing a double-sided POLO battery, comprising sequentially double-sided cleaning of silicon wafers, full passivation, ion implantation, high-strength conductive film and screen printing, and silicon oxide plus polysilicon is used for passivation in the full passivation process A fully passivated layer is formed.
[0023] Speci...
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