Microscope laboratory system

Abstract

The present invention belongs to the detection equipment technology field, and discloses a microscope laboratory system. The microscope laboratory system comprises an image sensing unit to which the light rays reach via a lens; an A / D conversion unit used for converting an electric signal transmitted by the image sensing unit into a digital signal; a DSP unit used for converting the digital signal transmitted by the A / D conversion unit into a digital image and transmitting to a storage unit; the storage unit used for storing the digital image processed by the DSP unit; a controller used for adjusting the focal length of the lens when the image sensing unit measures; a sensor used for obtaining the information of the image when the image sensing unit measures. According to the present invention, the automatically acquired image can be displayed on a special-purpose display real-timely, thereby improving an intuitional problem; the storage unit image identification solves an image confusion problem in the prior art, and the miscellaneous signals that cannot be something else are filtered, thereby guaranteeing the purification of the image.

Description

technical field [0001] The invention belongs to the technical field of detection equipment, in particular to a microscope laboratory system. Background technique [0002] As related systems related to measuring devices including microscopes, those discussed in PTL1 and PTL2 are provided. In PTL1, after macro-inspection for visually observing scratches and strains on the wafer surface is performed, micro-inspection is performed to finely inspect positions for confirmation of features using a microscope. In a structure for performing such inspection, a macro-inspection unit capable of rotating / tilting a wafer is provided between the carrier and the micro-inspection unit. Although wafers are often inspected using separate devices (ie, a macro-inspection device and a micro-inspection device), such a structure for performing such inspections enables simplification of the inspection process. [0003] In PTL2, a structure includes an objective lens and a focus setting objective l...

AI Technical Summary

Problems solved by technology

[0010] To sum up, the problems existing in the existing technology are: the throughput of the measurement data of the existing microscope system is small, which cannot meet the needs of the measurement; the accurate image data cannot be obtained in a short time; the image purity of the existing technology is low

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