Micro area visible spectrometer and spectrum measurement method

Abstract

The invention discloses a micro area visible spectrometer and a spectrum measurement method. The micro area visible spectrometer comprises two optical path supports, i.e. a horizontal optical path support and a vertical optical path support; and a transmission output module, a reflection output module, a microscopy module, an imaging observation module, a spectral measurement module, an adjustable diaphragm and a sample three-dimension adjusting table which are arranged on the two optical path supports, wherein the horizontal optical path support and the vertical optical path support enable an optical path to be communicated through a reflecting mirror; the transmission output module, the reflection output module and the microscopy module are fixed on the vertical optical path support, and the imaging observation module, the adjustable diaphragm and the spectral measurement module are fixed on the horizontal optical path support. The micro area visible spectrometer provided by the invention has the advantages of simple structure, high stability, convenient regulation and convenient expansion, and can realize microscopic observation on a sample, can carry out transmission-type and reflection-type visible spectrum measurement on the sample of 5 micron multiplies 5 micron or more in an effective light transmission area.

Description

technical field [0001] The invention relates to the technical field of microscopic visible spectrometers, in particular to a multifunctional micro-region visible spectrometer with the advantages of low cost, easy expansion, simple operation, small sampling area and the like. Background technique [0002] Today, with the rapid development of modern information technology, micro-nano optics, biology and other related disciplines, the requirements for device miniaturization and on-chip integration are getting higher and higher. The size of many micro-nano devices or biological samples has been reduced to the order of microns. Traditional microspectrometers have been difficult to meet the needs of spectral measurement in small sampling areas. [0003] For traditional microspectrometers, when measuring the visible spectrum of a sample, it is necessary to focus and collimate the light beam so that the collimated parallel light irradiates the area to be measured of the sample, and ...

AI Technical Summary

Problems solved by technology

For samples with a size in the micron range, it is difficult for a micro-spectrometer to focus the light spot to such a small size that the invalid light that does not irradiate the sample interferes with the measurement results and causes errors

In addition, during the test, due to the small size of the sample, there will be problems such as difficulty in positioning and the influence of stray light

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