Piezoresistive tri-axial acceleration sensor with anti-overload capability and preparation method thereof

Abstract

The invention discloses a piezoresistive tri-axial acceleration sensor with an anti-overload capability. The sensor comprises a substrate; a mass block (1) and eight rectangular beams (2) are formed at the center of the substrate through etching; four edges of the upper part of the mass block (1) are integrally connected with the substrate through the rectangular beams (2), namely, the right edge of the mass block (1) is connected with the frame of the substrate through the beam L1 and the beam L2, and the upper edge of the mass block (1) is connected with the frame of the substrate through the beam L3 and the beam L4, the left edge of the mass block (1) is connected with the frame of the substrate through the beam L5 and the beam L6, and the lower edge of the mass block (1) is connected with the frame of the substrate through the beam L7 and the beam L8; and anti-overload gaps (6) are left between the beams, between the edges of the mass block and the substrate, and between the beams and the substrate. According to the piezoresistive tri-axial acceleration sensor with the anti-overload capability of the invention, the anti-overload capability of the tri-axial acceleration sensor in the X direction, Y direction and Z direction of the Cartesian coordinate system is realized by means of limiting the displacement of the mass block.

Description

technical field [0001] The invention relates to a piezoresistive acceleration sensor in the field of MEMS sensors, in particular to a structural design and a process realization method of an acceleration sensor in three directions for detecting moving objects. Background technique [0002] With the rapid development of micro-electromechanical systems and micro-nano technology, the manufacture of sensors has entered a stage of rapid development. MEMS acceleration sensor is one of the earliest developed MEMS sensors. Due to the characteristics of small size, light weight, high reliability, fast response, easy integration and intelligence, and mass production, MEMS acceleration sensors have become one of the most widely used MEMS sensors. Current MEMS acceleration sensors mainly include three types: piezoelectric, capacitive and piezoresistive. [0003] Piezoelectric acceleration sensors have the advantages of strong anti-interference ability, little influence by temperature ...

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Problems solved by technology

[0004] However, the traditional piezoresistive acceleration sensor does not have the ability to resist overload. When the acceleration sensor is subjected to an acceleration exceeding the range of the sensor, it is easy to cause destructive damage, resulting in the acceleration sensor being unable to be used again.

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