Capacitive micromechanical band-pass filter with double elliptical plates

Abstract

The invention discloses a capacitive double ellipse disc micromechanical band-pass filter, which includes a mechanical part and an electrical part. The structure of the mechanical part is symmetrical, including two vibrating elliptical disks of identical size, coupling beams, input electrodes, output electrodes, two anchor points of elliptical disks of identical size and an insulating bottom layer; the electrical part includes AC voltage source, input terminal resistance, Load resistor, ground. The two vibrating elliptical disks are connected through a coupling beam arranged at the outer joint of the long axis of the elliptical disks, and the input and output electrodes surround the two vibrating elliptical disks respectively to form a capacitive transducer resonator. The invention adopts two completely identical elliptical disc resonators to form a capacitive micro-machine band-pass filter through the coupling of coupling beams, which has small volume and weight, high resonance frequency and short response time. The bandwidth of the filter can be changed by adjusting the coupling beam; the working center frequency of the filter can be changed by adjusting the gap between the elliptical disc and the electrode or the size of the elliptical disc.

Description

technical field [0001] The invention relates to a micro-mechanical MEMS filter structure, which belongs to the technical field of components in the technical field of radio frequency communication and micro-electromechanical systems (MEMS), and specifically relates to a filter structure coupled by two identical capacitive elliptical disk resonators. Micromechanical bandpass filter. Background technique [0002] MEMS is the abbreviation of Microelectro Mechanical Systems (Microelectro Mechanical Systems), which combines the dual characteristics of machinery and electricity, integrates microelectronics technology and precision machining technology, and is used to develop miniaturized and intelligent products. Another revolution in the application of technology. The RF-MEMS micromechanical filter used in the field of radio frequency communication is a special filter made of MEMS technology and selected based on the natural resonance frequency of mechanical vibration. It combin...

AI Technical Summary

Problems solved by technology

The piezoelectric resonator electromechanical has a small motion impedance and is easy to match the RF circuit, but the piezoelectric driving method needs to use the piezoelectric characteristics of the material when driving, and the frequency stability and repeatability are low, and it is also difficult for piezoelectric materials. requirements, increasing the complexity of the process

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