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Particle beam excited vacuum ultraviolet-visible band magnetic spectrometry method and system

A vacuum ultraviolet and spectral testing technology, applied in the measurement of color/spectral characteristics, polarization influence characteristics, etc., can solve the problems of limited time resources, large power loss, and difficult to hit etc.

Active Publication Date: 2019-08-20
无锡纽飞格科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

A better way is to use deep ultraviolet lasers, but the wavelengths of deep ultraviolet lasers are currently in the range of 200-100nm, and it is difficult to obtain wavelengths of 100-10nm
Or generate by laser frequency doubling, but the power loss is very large during frequency doubling, and the frequency band is often not enough to meet the test requirements
[0003] The second is to use synchrotron radiation excitation. The disadvantage is that a large accelerator is required, the equipment is expensive, and the machine time resources are very limited.
However, electron beam excitation cannot be used to measure magnetic spectra, because electrons are charged and deflected in a magnetic field, making it difficult to hit a sample placed in a magnetic field
[0005] For the same reason, ion excitation cannot be used to measure magnetic spectra

Method used

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  • Particle beam excited vacuum ultraviolet-visible band magnetic spectrometry method and system
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  • Particle beam excited vacuum ultraviolet-visible band magnetic spectrometry method and system

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Embodiment Construction

[0029] The present invention will be further described below in conjunction with drawings and embodiments.

[0030] The invention provides a magnetic spectrum test method in the vacuum ultraviolet-visible light band excited by particle beams, referring to figure 1 , including the following steps:

[0031] (1) In a vacuum environment, the excitation source 1 is used to generate proton beam ejection, the proton beam is neutralized by the ion beam neutralizer 3 to form a neutral energy-carrying atomic beam, and the energy-carrying atomic beam is transmitted to the sample stage 5 Placed on the surface of the sample, the atoms in the surface layer of the sample are excited, and the electron transitions of the atoms in the excited state generate the ultraviolet spectrum;

[0032] (2) Control the electromagnet 19 in the sample stage 5 so that the magnetic field produced is parallel or perpendicular to the propagation direction of the ultraviolet spectrum; the ultraviolet spectrum un...

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Abstract

The invention provides a method and a system for testing magneto-optical spectrum of a particle beam-excited vacuum ultraviolet-visible light wave band. The method and the system have the advantages that an ion beam with charges is neutralized with an electron beam to form a neutral particle beam (atom beam), the particle beam can excite a sample without being influenced by a magnetic field; the superfine structure in the substance is reflected by electromagnetic radiation caused by atomic energy and transition energy; an optical signal is subsequently treated and controlled by a monochromator and the like, and the produced electromagnetic radiation in different frequency bands in the particle bombing process is detected, including the infrared-visible light-ultraviolet-vacuum ultraviolet light, so that the substance structures of different levels are disclosed, and the electron structure basis is provided for the research and development, production and application of novel materials.

Description

technical field [0001] The invention relates to a particle beam excited vacuum ultraviolet-visible light band magnetic spectrum testing method and system, belonging to the technical field of magnetic spectrum precision detection. Background technique [0002] Deep ultraviolet is vacuum ultraviolet (Vacuum Ultraviolet, referred to as VUV). The vacuum ultraviolet wavelength is 200-100nm, and the lower one can be 100-10nm. It is an important optical frequency band for detecting some deep atomic energy level transitions or solid energy band transitions, but it has not been effectively developed and utilized. The reason is that it is difficult to generate a vacuum ultraviolet spectrum. Although ordinary light sources such as xenon lamps and mercury lamps have deep ultraviolet lines, their intensity is extremely weak. A better way is to use deep ultraviolet lasers, but the wavelengths of deep ultraviolet lasers are currently in the range of 200-100nm, and it is difficult to obta...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/33G01N21/21
Inventor 瓦西里·帕尼洛维奇李娜左文彬付德君
Owner 无锡纽飞格科技有限公司
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