A method for rapid oxidation treatment of hole transport layer of perovskite solar cell
A hole transport layer and solar cell technology, applied in the field of solar cells, can solve the problems of long time consumption and poor controllability of the hole transport layer, and achieve the effects of flexible scale, good device performance and fast reaction process.
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[0027] Using a flat-plate capacitively coupled discharge device, a stable oxygen plasma is generated to quickly oxidize the hole transport layer to realize the normal operation of the solar cell device:
[0028] (1) The device obtained in Comparative Example 1 step (4) is placed in figure 2 On the lower electrode of the shown parallel plate capacitively coupled discharge device (the upper part in the vacuum chamber is provided with an upper electrode with a hole, the lower part has a parallel lower electrode, and there is an oxygen inlet just above the upper electrode), the hole transport layer is on the bottom electrode. above, and then vacuum chamber pressure to 3Pa.
[0029] (2) Open the intake valve to feed oxygen, the flow rate is 10sccm, and the vacuum chamber pressure is 20Pa; turn on the radio frequency power supply (frequency is 13.56MHz), and form a uniform oxygen low-temperature plasma between the upper and lower electrodes, and adjust the discharge power to 10W. ...
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