Plane air floatation workbench based on optical feedback and control method

Abstract

The invention discloses a plane air floatation workbench based on optical feedback. The plane air floatation workbench comprises a lower panel, an upper panel, an electromagnetic drive unit used for driving the upper panel, an air floatation unit used for suspending the upper panel, an infrared sensor set used for positioning and a control unit used for guiding and the upper panel to move and positioning the position where the upper panel moves. A control method comprises the following steps that an air film is generated at the bottom of the upper panel through an air flotation bearing firstly to enable the upper panel to suspend in air and to be able to freely move; then a transverse coil and a longitudinal coil are driven to work in a time division mode according to a preset movement track to enable the upper panel to quickly transversely wriggle or longitudinally wriggle; and finally infrared transceivers located in five orientations reflect infrared rays of different wave lengths to the upper panel, and the real-time position of the upper panel is determined by receiving reflected infrared image data, so that the driving time of a transverse driver and a longitudinal driver is determined, the corresponding speed of a platform is increased, and the corresponding positioning precision of the platform is improved. The plane air floatation workbench based on optical feedback is simple in structure, small in size, high in bearing capacity and positioning precision and stable and reliable in running.

Description

technical field [0001] The invention relates to the field of precision motion control devices, in particular to an optical feedback-based planar air-floating workbench and a control method thereof. Background technique [0002] The traditional motion platform adopts a stacked guide rail structure, and the stator and the mover are connected by mechanical bearings, so there is mechanical friction during the movement of the mover. Mechanical friction not only increases the frictional resistance of the mover, causes wear of the moving parts, causes vibration and noise of the mechanical parts, but also limits the movement accuracy of the platform. In addition, the motion accuracy is affected by the support surface, and the precision of the support surface is very high, which also increases the production cost of the platform virtually. At the same time, the stiffness, stability, and dynamic characteristics of the guide rail drive all affect the working accuracy and characteristi...

AI Technical Summary

Problems solved by technology

Mechanical friction not only increases the frictional resistance of the mover, causes wear of the moving parts, causes vibration and noise of the mechanical parts, but also limits the movement accuracy of the platform

In addition, the motion accuracy is affected by the support surface, and the precision of the support surface is very high, which also increases the production cost of the platform.

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