Matched test system for detecting spectrum characters generated by sample under electron beam excitation
A technology for testing samples and spectral characteristics, which is applied in the field of experimental systems, can solve problems such as the inability to provide high-vacuum experimental environments for graphene samples that cannot be excited by electron injection, and achieve reasonable design effects
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[0023] In order to further understand the content of the invention, features and effects of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments:
[0024] Such as Figure 1-Figure 5 As shown, the device of the present invention includes a mechanical pump 1, a molecular pump 2, a molecular pump and a mechanical pump control platform 3, and a vacuum chamber 4. The vacuum chamber 4 is provided with a chamber exhaust hole, an observation window 5 up and down, front and rear respectively and the chamber door 6, the chamber door 6 is opened and closed through a slideway, and the outer side is provided with a double-core electrode 7, the outer half of the electron gun rotation control rod 8-1 and a six-core electrode 9, and the inner side is provided with a sample stage 13 and The electron gun rotates the inner half of the lever 8-2. The shell of the vacuum chamber 4 is a metal structure,...
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