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Design method of novel ozone generator jet plate

A technology of ozone generator and design method, which is applied in the direction of electrical components, semiconductor devices, climate sustainability, etc., can solve the problems of uneven oxide film, uneven air flow of air jet plate, etc., and achieve the effect of uniform air flow

Inactive Publication Date: 2017-06-23
ZHEJIANG FORTUNE ENERGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a new design method of the ozone generator jet plate, to solve the problem of uneven oxide film generated due to the uneven ventilation of the ozone generator jet plate

Method used

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  • Design method of novel ozone generator jet plate
  • Design method of novel ozone generator jet plate
  • Design method of novel ozone generator jet plate

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Embodiment Construction

[0012] The technical solution of the present invention will be described in further detail below in conjunction with the accompanying drawings.

[0013] In this example, after preparing an oxide film on the surface of a silicon wafer using the traditional ozone generator air jet pore structure and the air jet air pore structure provided in the present invention, the prepared oxide film is judged by detecting the hydrophilicity of the silicon wafer. uniformity. The air holes of the traditional ozone generator jet plate adopt a side-by-side arrangement structure, and its design size is as follows: the diameter of each air hole d 1 =1mm, the distance between two adjacent air holes in the same row is A=5mm, the distance between two adjacent air holes is B=10mm, and the air holes of the ozone generator jet plate prepared by the above-mentioned structural size are prepared on the surface of the silicon wafer by using this device Oxidation film, and the hydrophilicity test. Firstly...

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Abstract

The invention discloses a design method of a novel ozone generator jet plate. The jet plate is composed by pores of the truncated cone structures, the two adjacent rows of pores are arranged in an alternate manner, the upper diameter (d2) of the truncated cones is greater than or equal to 0.1 mm, the lower diameter (d3) is greater than or equal to 0.2 mm, the lower diameter (d3) is greater than the upper diameter (d2), the spacing between two adjacent pores in the same row is greater than or equal to 0.2 mm, and the spacing between the two adjacent rows of pores is greater than or equal to 0.2 mm. The beneficial effects of the method are that the ventilation volume of the ozone generator jet plate is uniform, and a uniform oxide film can be generated.

Description

technical field [0001] The invention relates to the field of preparation of crystalline silicon solar cells, in particular to a design method of a novel ozone generator jet plate. Background technique [0002] After the polysilicon battery module is packaged, the power loss will be too large if it is used for a long time in a harsh environment or tested under double 85 conditions. Using the original preparation process, the power loss of the module can reach more than 50% under long-term use or double 85 conditions. At present, an oxide film is formed on the surface of the silicon wafer by spraying ozone on the silicon wafer with an ozone generator, thereby reducing the power loss of the module. However, there are certain problems in the design of the air hole of the current ozone generator jet plate, which leads to uneven ventilation and uneven oxide film. A new type of ozone generator air jet plate pore structure is designed to form a uniform oxide film on the surface of...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67H01L31/18
CPCH01L21/67126H01L31/186Y02P70/50
Inventor 赵桂梅
Owner ZHEJIANG FORTUNE ENERGY
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