A silicon solar thin film battery based on a double-layer micro-nano two-dimensional multi-tooth resonant grating
A technology of solar thin film and grating, applied in the field of optics
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[0031] Describe in detail below in conjunction with accompanying drawing:
[0032] 1. Overall
[0033] Such as figure 1 As shown, the upper and lower surfaces of the silicon active layer of the solar thin film cell are provided with a micro-nano two-dimensional multi-tooth resonant grating that changes periodically along the X and Y axes, and there are two grating teeth of silicon material in each period, and two A material is a grating groove of air, and the thickness of the grating layer is along the Z-axis direction.
[0034] 2. Micro-nano two-dimensional multi-tooth resonant grating on the upper surface of the silicon active layer:
[0035]The grating period along the X axis is 1200 nm (T x1 =1200nm), there are two grating teeth of silicon material in each period, and their widths are respectively, wx 11 = 130 nm, wx 12 =54 nanometers; and two grating grooves made of air, whose widths are respectively, kx 11 =306 nm, kx 12 =710nm;
[0036] The grating period along ...
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