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Gas static pressure platform and clearance adjustment method thereof

A gap adjustment method and aerostatic pressure technology, which are used in large fixed members, metal processing machinery parts, metal processing equipment, etc., can solve the problems of easy to produce air hammer phenomenon, affect the stability of the stage, and increase the spacing.

Inactive Publication Date: 2017-06-13
METAL INDS RES & DEV CENT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] A known aerostatic platform includes a platform and a track. The platform has a carrier and an aerostatic bearing. The aerostatic bearing transports gas so that the platform is air-floated on the track. In order to increase the bearing capacity of the carrier, the air supply pressure of the aerostatic bearing is usually increased, but relatively the distance between the carrier and the track will also be increased, so the pneumatic hammer phenomenon (pneumatic hammer) will easily occur. ), which affects the stability of the stage when it moves on the track

Method used

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  • Gas static pressure platform and clearance adjustment method thereof
  • Gas static pressure platform and clearance adjustment method thereof
  • Gas static pressure platform and clearance adjustment method thereof

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Embodiment Construction

[0040] see Figure 1 to Figure 3 , a gas static pressure platform 100 of the present invention is used in precision equipment such as an exposure machine for optoelectronic semiconductors, a precision processing machine, or a positioning platform for measuring equipment. The gas static pressure platform 100 includes a platform 110 and a track 120 And at least one electromagnet 130, the stage 110 is arranged on the track 120, and the stage 110 moves along the track 120, the stage 110 has a carrier 111 and at least one aerostatic bearing 112, the aerostatic bearing 112 is set on the carrier 111, the aerostatic bearing 112 can be made of a porous throttling component, and the material of the aerostatic bearing 112 can be selected from materials with microporous structures such as porous graphite, ceramics or copper. In this embodiment, the aerostatic bearing 112 is located between the carrier 111 and the rail 120, the carrier 111 has at least one groove 111c and at least one thro...

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Abstract

The invention discloses a gas static pressure platform and a clearance adjustment method thereof. The gas static pressure platform comprises a carrier stage, a track and an electromagnet; the carrier stage is installed on the track; a gas static pressure bearing of hte carrier stage is used for conveying air to blow to the track so that the carrier stage floats above the track and there is longitudinal space between a carrier of the carrier stage and the track; the electromagnet is installed at one of hte carrier or the track and is used for reducing the longitudinal space between the carrier and the track through changing the magnetic field intensity of the electromagnetic so that the stability of the carrier stage moving on the track is increased.

Description

technical field [0001] The present invention relates to a gas static pressure platform and a method for adjusting the gap thereof. In particular, an electromagnet is arranged on one of the carriers or tracks of the gas static pressure platform, and the magnetic field strength of the electromagnet is changed to reduce the size of the gap. The aerostatic pressure platform and its gap adjustment method for the longitudinal distance between the carrier and the rail. Background technique [0002] A known aerostatic platform includes a platform and a track. The platform has a carrier and an aerostatic bearing. The aerostatic bearing transports gas so that the platform is air-floated on the track. In order to increase the bearing capacity of the carrier, the air supply pressure of the aerostatic bearing is usually increased, but relatively the distance between the carrier and the track will also be increased, so the pneumatic hammer phenomenon (pneumatic hammer) will easily occur. ...

Claims

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Application Information

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IPC IPC(8): B23Q1/38
CPCB23Q1/38
Inventor 庄殷简国谕陈彦廷
Owner METAL INDS RES & DEV CENT
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