Fizeau synchronization phase shift interference test device based on prism light splitting phase shift

Abstract

The invention provides a Fizeau synchronization phase shift interference test device based on prism light splitting phase shift. The device comprises an interference system, a prism light splitting phase shift system and an imaging system which are successively arranged along a light path direction. Light from a laser enters into the interference system. A quarter of wave-plate front surface is taken as a reference plane. Transmission light passes through a quarter of a wave plate twice back and forth and forms orthogonal polarized light with measured piece information with reflected light. The orthogonal polarized light enters into the prism light splitting phase shift system and is divided into three beams of parallel orthogonal polarized light whose phase deviations are 0, pi / 2 and minus pi / 2, and finally enters into the imaging system. Beam compressing is performed on the light, and then the light passes through a polarizing film and is imaged to a detector via an imaging object lens so as to form three interference fringes. In the invention, an environment vibration interference can be effectively prevented and the device possesses characteristics that a luminous energy utilization rate is high; the structure is compact; and a system error is small.

Description

technical field [0001] The invention relates to the field of optical interference testing, in particular to a Fizeau-type synchronous phase-shifting interference testing device based on prism splitting and phase-shifting. Background technique [0002] Fizeau-type interferometer is a commonly used equal-thickness interferometer. It has the characteristics of a common optical path for reference light and test light. It can be used for surface measurement of plane, spherical and aspherical surfaces, measurement of spherical curvature radius and various lenses. , prisms, measurements of the wavefront transmission quality of optical systems. [0003] Phase-shifting interferometry is a precise optical interferometry technique, which uses precise phase-shifting devices to sequentially introduce specific phase-shifting values ​​into the reference light path, and changes the phase difference between the reference light and the test light to achieve phase modulation. CCD) collects di...

AI Technical Summary

Problems solved by technology

This solution uses a parallel plate for light splitting. Due to the multiple reflections of light in the reference arm, it is difficult to control the light intensity of the interference image and the utilization rate of light energy is low.

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