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Electron beam evaporation oblique deposition coating device and application method

An electron beam evaporation and oblique deposition technology, which is applied in vacuum evaporation plating, ion implantation plating, sputtering plating, etc., can solve the problems of manpower and time waste, limited temperature range, etc.

Active Publication Date: 2018-11-20
HANGZHOU INSTITUTE OF OPTICS AND FINE MECHANICS
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the influence of equipment stability, the process parameters between different experiments are often different. It is a huge challenge to explore the influence of different preparation processes on the performance of "sculpture" films
Moreover, it is a great waste of manpower and time to make only one sample with a fixed inclination angle each time
Generally, the operating temperature of the stepper motor itself cannot exceed 135 degrees Celsius, which limits the temperature range of the experiment

Method used

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  • Electron beam evaporation oblique deposition coating device and application method
  • Electron beam evaporation oblique deposition coating device and application method
  • Electron beam evaporation oblique deposition coating device and application method

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Embodiment Construction

[0047] Please see first figure 1 , figure 2 , as can be seen from the figure, the electron beam evaporation oblique deposition coating device of the present invention includes a vacuum system 1, an air intake device 2, an exhaust valve 3, a stepping motor 4, a connecting cylinder 5, a substrate mounting fixture 6, and a movable baffle 7 , angle collimation device 8 and electron beam evaporation source 9, stepping motor driver and computer, constitute oblique deposition coating device by substrate mounting fixture 6, angle collimation device 8 and connecting stud 10 thereof:

[0048] refer to image 3 , the substrate installation fixture 6 is disc-shaped, from the center to the outer edge of the disc, a first substrate installation circular hole 61, a connecting cylinder connecting screw hole, and a first substrate installation hole 61 are sequentially arranged symmetrically on circles with different diameters. 65. A plurality of second substrate installation holes 62, a plu...

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Abstract

The invention provides an electron beam evaporation and inclined deposition coating device and a using method. The device comprises an angle collimating device, a substrate installing clamp, a connecting stud, a connecting cylinder, a stepping motor, a stepping motor driver and a computer. The electron beam evaporation and inclined deposition coating device is characterized by being formed by the substrate installing clamp, the angle collimating device and the connecting stud and provided with multiple electron beam evaporation and deposition channels with different inclination angles. According to the electron beam evaporation and inclined deposition coating device and the using method, multiple sculpture thin films which are consistent or inconsistent in inclination angle can be obtained through one-time coating, and the device has the advantages of being simple in structure, stable in performance, high in operability and the like.

Description

technical field [0001] The invention relates to film coating, in particular to an electron beam evaporation oblique deposition coating device and a using method for coating a "sculpture" film in an electron beam evaporation coating machine. Background technique [0002] With the continuous improvement and development of coating technology, electron beam evaporation coating technology has become a very widely used coating technology in industry, and electron beam evaporation coating machine is a commonly used optical coating equipment. The equipment mainly consists of three parts: vacuum system, thermal evaporation system, and film thickness control system. The coating process is carried out in a vacuum chamber. figure 1 It is a structural diagram of the vacuum chamber of an existing electron beam evaporation coating machine, mainly including a vacuum system 1, an air intake device 2, an exhaust valve 3, a stepping motor 4, a connecting cylinder 5, a substrate mounting fixtur...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/30C23C14/50
CPCC23C14/225C23C14/30C23C14/505
Inventor 齐红基靳亚雪王斌袁佳丽
Owner HANGZHOU INSTITUTE OF OPTICS AND FINE MECHANICS
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