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Quartz swing plate substrate and preparation method thereof

A quartz swing piece and quartz glass piece technology, applied in the field of optical components, can solve the problems of poor parallelism and thickness consistency of the quartz glass disc, difficult detection of the thickness of the quartz glass disc, complicated grinding and polishing processes, etc., and improve the operability. performance and accuracy, saving materials, and eliminating processes

Active Publication Date: 2018-04-10
CHINA BUILDING MATERIALS ACAD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] For the processing of quartz pendulum substrates, the main processing methods currently used in the industry are quartz glass raw material cutting, rough rounding, fine rounding, inner circle slicer slicing, chamfering, single-side grinding, and single-side polishing. The current methods are mainly There are some disadvantages as follows: 1. Quartz glass raw material cutting method results in low material utilization rate and increased raw material cost; 2. The cutting edge of the inner circle slicing method is wide, resulting in waste of materials; 3. The grinding and polishing process is complicated and inefficient, and the quartz glass When the glass disc is attached to the substrate, the thickness of the rosin or white wax between the two is inconsistent, resulting in poor parallelism and thickness consistency of the quartz glass disc
In addition, the thickness of the quartz glass disc is not easy to detect

Method used

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  • Quartz swing plate substrate and preparation method thereof
  • Quartz swing plate substrate and preparation method thereof
  • Quartz swing plate substrate and preparation method thereof

Examples

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Effect test

preparation example Construction

[0030] A preparation method for a quartz swing plate substrate, comprising the following steps:

[0031] (1) Rod extraction: Use a rod extraction machine to extract rods from quartz glass raw materials. The drill bit used is a copper sintered diamond cylindrical drill bit with a diamond mesh of 150-1000 mesh. / min, the diameter of the rod is 2-4mm larger than the diameter of the quartz pendulum substrate to be prepared;

[0032] (2) Spheronization: Use a cylindrical grinder to carry out cylindrical grinding on the bar. The used grinding wheel is a resin sintered diamond grinding wheel not less than #320, and the feed speed of the grinding wheel is not greater than 0.1mm / min. The diameter of the material is ground to the size of the quartz pendulum substrate;

[0033] (3) Wire-cut slicing: use a multi-wire cutting machine to cut the bar stock into quartz glass sheets by wire-cutting. The used wire rod is a 0.1-0.3mm electroplated diamond cutting wire with a diameter of 0.1-0.3...

Embodiment 1

[0054] Taking the processing of a quartz pendulum substrate with a diameter of 22.200±0.010mm and a thickness of 0.700±0.005mm as an example to illustrate the processing method, it includes the following steps:

[0055] 1. Rod extraction: Place the quartz glass raw material in the processing area of ​​the rod extraction machine and fix it. Use the #150 copper sintered diamond sleeve drill bit to drill the bar material at the selected position of the quartz glass ingot. The drill bit rotates at 2000r / min during processing. , the feed speed is 3mm / min, and the bar diameter is 25-26mm.

[0056] 2. Rounding: place the quartz glass bar between the headstock and the tailstock of the cylindrical grinder, and use #320 resin diamond grinding wheel to grind the outer circle of the quartz glass bar. The feed speed of the grinding wheel is 0.1mm during the processing / min, the diameter of the quartz glass cylinder after grinding is 22.200±0.010mm.

[0057] 3. Wire-cut slicing: fix the qu...

Embodiment 2

[0063] Taking the processing of a quartz pendulum substrate with a diameter of 25.000±0.010mm and a thickness of 0.750±0.005mm as an example to illustrate the processing method, it includes the following steps:

[0064] 1. Rod extraction: Place the quartz glass raw material in the processing area of ​​the rod extraction machine and fix it. Use the #500 electroplated diamond sleeve drill bit to drill the bar material at the selected position of the quartz glass ingot. The drill bit speed is 3000r / min during processing. The feed rate was 5mm / min and the bar stock diameter was 27-28mm.

[0065] 2. Rounding: place the quartz glass bar in the working area of ​​the centerless grinder, use #400 resin diamond grinding wheel to grind the outer circle of the quartz glass bar, the feed speed of the grinding wheel is 0.1mm / min during the processing, and after grinding The diameter of the quartz glass cylinder is 25.000±0.010mm.

[0066]3. Wire-cut slicing: fix the quartz glass cylinder i...

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Abstract

The invention discloses a quartz pendulous reed substrate and a preparation method thereof, and belongs to the field of optical elements. The preparation method comprises the following steps: crystal coring, external grinding, slicing adopting linear cutting, chamfering, two-sided lapping, double-sided polishing and annular polishing. The quartz pendulous reed substrate and the preparation method thereof have the advantages that the processing precision is high, the efficiency is high and saving materials is achieved.

Description

technical field [0001] The invention relates to the field of optical elements, in particular to a quartz pendulum substrate and a preparation method thereof. Background technique [0002] Quartz flexible accelerometer is a high-precision acceleration sensor, which is widely used in aerospace, shipbuilding, oil exploration and other fields. It is usually composed of a quartz pendulum and a functional circuit. The quartz pendulum is the core component of the quartz flexible accelerometer, which acts as an inertia sensitive function. Its processing quality has an important impact on the accuracy and stability of the accelerometer. The quartz swing plate substrate is the premise of making the quartz swing plate. It is a circular quartz glass polished piece with a specific size, which is subsequently formed into a quartz swing plate through engraving, acid etching, coating and other processes. Therefore, the quartz swing plate substrate Indicators such as flatness, parallelism, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B28D1/00B28D1/22B24B1/00
CPCB24B1/00B28D1/00B28D1/22
Inventor 张晓强宋学富孙元成杜秀蓉王慧符博杨晓会
Owner CHINA BUILDING MATERIALS ACAD
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