Plasma space characteristic diagnostic device

Abstract

The invention discloses a plasma space characteristic diagnostic device, belongs to the plasma characteristic diagnostic field, and provides the plasma space characteristic diagnostic device capable of diagnosing plasma space characteristics; the plasma space characteristic diagnostic device comprises a plasma generator and a detector; a sealable plasma forming cavity is arranged in the plasma generator; the detector comprises a detection probe and a detection probe mount platform; the detection probe is arranged on the probe mount platform; the detection end of the detection probe extends into the plasma forming cavity. The plasma space characteristic diagnostic device can detect and diagnose characteristic parameters of the plasma in different space positions; the probe mount platform can correspondingly move the detection probe, thus moving the detection probe in different positions at will, and diagnosing the characteristic parameters of the plasma in different space positions.

Description

technical field [0001] The invention relates to plasma characteristic diagnosis technology, and a plasma space characteristic diagnosis device. Background technique [0002] Plasma diagnostic technology is divided into active and passive. Active diagnostic technology uses active electromagnetic waves, particle beams or probes to immerse into the plasma, collects relevant characteristic data in the plasma environment, and passes corresponding data processing. The method obtains the plasma information; the passive diagnosis technology does not actively immerse into the plasma, but obtains the plasma information by receiving the electromagnetic wave or particle beam emitted by the plasma to be analyzed during the diagnosis process. [0003] By diagnosing the characteristics of the plasma, experimental data can be provided for optimizing plasma process parameters, improving plasma equipment, etc., so that the plasma device can complete the work more efficiently and excellently. ...

AI Technical Summary

Problems solved by technology

[0004] The plasma has a certain spatial volume, so the plasma parameters vary greatly in different spatial positions, and most of the existing plasma processes and experimental research have extremely high requirements for the uniformity of the plasma space, so whether it is in the plasma It is of great significance to the spatial diagnosis of plasma characteristic parameters whether it is applied in the body industry or in laboratory research. However, the diagnosis of the spatial characteristics of the plasma is still blank.

Images