Aspheric optical element surface shape detection device

A technology for optical components and surface shape detection, which is applied in the direction of using optical devices, measuring devices, instruments, etc., to reduce the impact and improve the accuracy of surface shape detection

Inactive Publication Date: 2017-05-10
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, in the prior art, there is no optical element surface shape measurement interferometer device for measuring the beam vertically upward

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  • Aspheric optical element surface shape detection device

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Embodiment Construction

[0025] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the implementation manners in the present invention, all other implementation manners obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of the present invention.

[0026] It is worth noting that, in the present invention, terms such as "installation", "installation", "connection" or "fixation" should be interpreted in a broad sense, for example, it may be a fixed connection, or It can be a detachable connection, or an integral connection; it can be a mechanical connection, or it can be an electrical connection; it can be a direct connection, or an indirect connection through an interme...

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Abstract

The invention discloses an aspheric optical element surface shape detection device, which is used for carrying detection on surface shape information of an aspheric optical element, and comprises an interferometer and a reflector, a phase shifter, a standard mirror, a compensating mirror and an aspheric optical element, which are arranged in sequence from the bottom up in the vertical direction. The interferometer is used for emitting a measuring beam in the horizontal direction; the reflector is used for converting the measuring beam in the horizontal direction into a measuring beam in the vertical direction; the phase shifter is used for adjusting the phase of the measuring beam in the vertical direction; the standard mirror is used for providing a reference plane to reflect the measuring beam in the vertical direction; the compensating mirror is used for compensating the surface shape of the aspheric optical element; and the measuring beam reflected by the aspheric optical element and the measuring beam reflected by the reference plane of the standard mirror form interference fringes in the interferometer. The aspheric optical element surface shape detection device improves surface shape detection accuracy of the aspheric optical element.

Description

technical field [0001] The invention relates to the technical field of optical element measurement, in particular to a surface shape detection device for an aspheric optical element. Background technique [0002] Due to the use of aspheric optical elements, not only the performance of the optical system can be significantly improved, but also the structure of the system can be simplified, and the weight and cost of the system can be reduced. Therefore, aspheric optical elements are widely used in civil, military, astronomy, aerospace and other fields. application. With the continuous development of space technology, people have higher and higher requirements for the resolution and received energy of the optical system. Therefore, the requirements for the surface shape accuracy of aspheric optical elements are getting higher and higher. At this time, the corresponding high precision is required. Supported by processing equipment and testing technology. [0003] Optical inte...

Claims

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Application Information

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IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 李全松王汝冬张辉崔涛杨怀江隋永新
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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