MEMS optical switch module with N*N channels

Abstract

The invention relates to an MEMS optical switch module with N*N channels. Two identical MEMS chips and two identical N core collimators are installed at the same height on the same substrate. The lens planes of the two N core collimators are perpendicular to the substrate and parallel to each other. The lens installation planes of the two MEMS chips are perpendicular to the substrate, form an angle of 90 degrees, and face the lens matrix planes of the two N core collimators respectively at a 45-degree angle. Input light imported by an optical fiber of the first N core collimator is reflected when arriving at the lens of the first MEMS chip facing the first N core collimator, is reflected again when arriving at a lens of the second MEMS chip, enters a lens of the second N core collimator, and is output by an output optical fiber. By controlling the lenses of the two MEMS chips, the direction of light can be changed, and all-optical-path switching can be realized. The input and output optical fibers are arranged on the same side of the MEMS chips, and are easy to use. Optical path switching can be carried out at the same time in the multiple channels. Moreover, the MEMS optical switch module has the advantages of fast response, low insertion loss, good stability, compact structure, small size, and low weight.

Description

technical field [0001] The invention relates to the technical fields of optical communication and optical testing, in particular to an N*N channel MEMS optical switch module. Background technique [0002] MEMS (Micro-Electro-Mechanical-Systems) optical switch is a new type of miniaturized optical switch that combines electrical components, mechanical components, and micro-optical components. It is the development of large-capacity all-optical switching network switches. mainstream direction. [0003] The MEMS optical switch is to engrave a number of tiny mirrors on the silicon crystal, and make the micro mirrors mechanically move through static electricity or other control forces, thereby changing the direction of light propagation and realizing the switching function of optical path selection. Compared with other optical switches, MEMS optical switches have obvious advantages. Their switching time is generally on the order of ms. Using IC manufacturing technology, they are...

AI Technical Summary

Problems solved by technology

If the number of channels is increased to N×N according to its structure, the volume will be larger, the power consumption will be too high, the switching time will be too long, and the defects such as large insertion loss will make it impossible for practical application.

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