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Electronic gun filament heating current automatic tuning method based on constant grid bias voltage

A technology of grid bias voltage and heating current, which is applied in the field of automatic adjustment of heating current of electron gun filament, can solve the problem that electron beam processing equipment cannot take into account the service life of electron beam filament cathode, etc., and achieves the effect of prolonging life

Active Publication Date: 2017-02-22
SINOPEC ENG +1
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Problems solved by technology

[0005] The technical problem to be solved by the present invention is that the existing electron beam processing equipment cannot take into account both the quality of the electron beam and the service life of the filament cathode, and provides an automatic setting method for the heating current of the electron gun filament based on the constant grid bias voltage

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  • Electronic gun filament heating current automatic tuning method based on constant grid bias voltage
  • Electronic gun filament heating current automatic tuning method based on constant grid bias voltage
  • Electronic gun filament heating current automatic tuning method based on constant grid bias voltage

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Embodiment Construction

[0028] The principle of the present invention based on the electron gun filament heating current automatic tuning method with constant grid bias voltage is as follows:

[0029] The acceleration voltage of the three-pole Pierce electron gun is stabilized at U A value, while the gate bias voltage is constant at -U B value, after the filament current reaches a certain value, the electron beam current I B vs. filament current I F It is an exponential function relationship with the natural number e as the base, such as figure 1 shown. Define the filament current I F with minimum filament current I Fmin The difference is the relative filament current I f = I F -I Fmin , defining the electron beam current I B with minimum electron beam current I Bmin The difference is the relative electron beam current Then after the filament current exceeds a certain value, the relative electron beam current I b with relative filament heating current I f The relation is

[0030]

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Abstract

The invention discloses an electronic gun filament heating current automatic tuning method based on constant grid bias voltage. The method is characterized in that filament working currents are calculated by changing filament currents under the premise of constant grid bias voltage. The method has the advantages that the saturation degree of filament heating currents is judged and controlled in a quantitative manner, so that the electron beam quality performance of a tripolar Pierce electron gun can be brought into full play, and the service life of a filament cathode can be prolonged to the maximum extent.

Description

technical field [0001] The invention relates to the technical field of electron beam processing equipment, in particular to an automatic setting method for heating current of electron gun filament based on constant grid bias voltage. Background technique [0002] Electron beam processing equipment using an axisymmetric Pierce electron gun, the cathode emits electron beams subject to a temperature-limited state and a space-charge-limited state. In order to improve the quality of the electron beam, the temperature limit state of the existing electron beam processing equipment is saturated emission, and in the space charge limit state, the accelerating voltage is a constant value, and the grid bias voltage -U is changed b To change the effective emission area of ​​the cathode to control the electron beam current, the cathode (filament) adopts a constant current control method. [0003] However, due to the difference in materials and geometric dimensions between different filam...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/24
CPCH01J37/242
Inventor 黄小东韦寿祺费翔秦玉江陆苇郭华艳
Owner SINOPEC ENG
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