Galvanometer scanning system and scanning method for dual optical path imaging

Abstract

The invention relates to the field of laser technology, and discloses a galvanometer scanning system for dual optical path imaging. The galvanometer scanning system comprises a first lens, a second lens, a large field of view imaging unit, a small field of view imaging unit, a focusing mirror, an XY scanning galvanometer, and an optical source. An external laser optical path reaches the XY scanning galvanometer through the first lens, and after reflection, acts on an object to be marked to conduct marking sequentially through the focusing mirror and the second lens. The optical source is lit up to send out a lighting optical path to illuminate the object to be marked, the lighting optical path is reflected onto the second lens, a part of the lighting optical path is reflected through the second lens into the large field of view imaging unit to image for monitoring the marking condition. The other part of the lighting optical path is focused through the second lens and the focusing mirror onto the XY scanning galvanometer, and reflected through the first lens into the small field of view imaging unit to image for detecting the marking condition. The invention can improve the detection accuracy and detection efficiency of the scanning system.

Description

technical field [0001] The present invention relates to the field of laser technology, and more specifically, to a dual optical path imaging galvanometer scanning system and scanning method. Background technique [0002] In this era of rapid technological development, technological innovation has become a symbol of the current era, and the development of laser technology is even more unique. Many achievements of laser technology innovation are changing people's lives from all aspects, and it can be predicted that the 21st century will be an era of laser technology shining brightly. As an important role of laser technology, laser scanning technology will be widely used in laser processing, image transmission, medical CT equipment and so on. Among various laser scanning systems, the two-dimensional laser galvanometer scanning system has been most widely used due to its high speed and high efficiency. The working principle of the two-dimensional laser galvanometer scanning sy...

AI Technical Summary

Problems solved by technology

The working principle of the two-dimensional laser galvanometer scanning system is: the galvanometer scanning system is different from the general mechanical scanning system. The general mechanical scanning system uses the transmission of the screw to drive the scanning head to move back and forth on the two-dimensional plane to complete the scanning. , because it is mechanical, the inertia of the scanning system is large, and the scanning response speed is relatively slow

The existing laser equipment with visual detection function on the market will have a smaller detection field of view under the condition of meeting the product detection accuracy, which is determined by the resolution of the camera itself. For a camera with the same resolution, the field of view will be smaller. The smaller the value, the higher the accuracy of visual detection, but this will bring another problem, and the detection efficiency will be greatly reduced

The highest resolution camera currently on the market can only reach 10 million pixels, and it is difficult to find a lens with such a high resolution that can match it in the market now. Even if you can find it, the price of the camera and lens is very expensive It is difficult to meet the requirements of high quality, high efficiency and low cost in the current market

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