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Calibration method of broadband achromatic composite wave plates

A composite wave plate and calibration technology, which can be used in complex mathematical operations, measurement of light polarization, and material analysis by optical means. Effect

Inactive Publication Date: 2016-12-07
RAINTREE SCI INSTR SHANGHAI
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  • Abstract
  • Description
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Problems solved by technology

[0007] Some existing methods for calibrating the optical components in the Mueller matrix measurement system have not separately considered the problem of wave plate calibration when the optical axis of the complex wave plate is misaligned. Generally, the complex wave plate is considered to be an ideal wave plate , only the phase delay is calibrated, but in practical applications, especially in the Mueller matrix measurement system, the influence of optical axis misalignment must be considered

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  • Calibration method of broadband achromatic composite wave plates
  • Calibration method of broadband achromatic composite wave plates
  • Calibration method of broadband achromatic composite wave plates

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Embodiment Construction

[0030] In the following detailed description of the preferred embodiment, reference is made to the accompanying drawings which form a part hereof. The accompanying drawings show, by way of example, specific embodiments in which the invention can be practiced. The illustrated embodiments are not intended to be exhaustive of all embodiments in accordance with the invention. It is to be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention. Accordingly, the following detailed description is not limiting, and the scope of the invention is defined by the appended claims.

[0031] The purpose of the present invention is to provide a calibration method for the composite wave plate considering the deviation of the optical axis alignment of the achromatic composite wave plate, by reducing the unknown quantity of calibration, reducing the difficulty of calibration, and improving the accu...

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Abstract

The invention discloses a calibration method of broadband achromatic composite wave plates. The method comprises the following steps: A, determining a first matrix representing the composite wave plates, wherein the first matrix comprises at least one unknown number; B, based on the first matrix, determining relations between light intensity and alignment angle deviation values of the composite wave plates theoretically; and C, based on the theoretical relations between the light intensity and the alignment angle deviation values of the composite wave plates, determined based on the step B, calibrating a second matrix which can represent the composite wave plates and does not comprise unknown numbers. Through the technical scheme, during calibration of the composite wave plates or a measurement system, the quantity of the known numbers can be substantially reduced, the calibration difficulty is reduced, and the calibration precision is improved.

Description

technical field [0001] This patent relates to the technical field of polarization optical detection, in particular to a method for calibrating a wide-band achromatic composite wave plate for Mueller matrix measurement. Background technique [0002] Mueller matrix measurement is one of the important means of polarization detection. The Mueller matrix is ​​a 4×4 matrix, which describes the polarization effects and characteristics of optical devices and materials. It contains the polarization information of almost all measured materials and is widely used. In various fields such as materials, biology, semiconductors, etc., especially in the measurement of critical dimensions of semiconductor processes, it is an important basis for overcoming the defects of existing measurement technologies and measuring the critical dimensions of next-generation processes. Optical critical dimension measurement (OCD) technology. [0003] The Mueller matrix measurement system generally consists ...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02
CPCG01N21/21G01N21/274G01J4/04G01M11/02G06F17/14
Inventor 钟凤娇高海军党江涛
Owner RAINTREE SCI INSTR SHANGHAI
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